Young's modulus measurement of thin film PZT

Jia Zhou, Trevor McMcollough, Susan C. Mantell, Shayne Zurn

Research output: Contribution to journalConference articlepeer-review

9 Scopus citations

Abstract

In this paper, experimental measurements of the modulus for thin film PZT are presented. Several wafers with PZT patterned over Pt/Ti/SiO2 were fabricated. In each wafer, circular membranes of diameters ranging from 668 μm to 1667 μm were constructed using reactive ion etching. Film moduli for the various material layers were found by measuring membrane deflection under a concentrated load. Layer thickness was verified using SEM. To account for the initial curvature in the membrane, the relationship between load, deflection and stiffness was approximated by a spherical shell model. These stiffness values provided the basis for predicting micro cantilever beam vibration behavior.

Original languageEnglish (US)
Pages (from-to)153-157
Number of pages5
JournalBiennial University/Government/Industry Microelectronics Symposium - Proceedings
StatePublished - 1999
EventProceedings of the 1999 13th Biennial University / Goverment / Industry Microelectronics Symposium (UGIM) - Minneapolis, MN, USA
Duration: Jun 20 1999Jun 23 1999

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