This paper presents a wireless capacitive pressure sensor based on LTCC (low temperature co-fired ceramic) technology, where the design, fabrication, and measurement of the sensor is demonstrated and discussed. Differ from traditional LTCC process flow, a unique process of screen-printing sacrifice layer has been introduced to avoid deformation of the capacitive embedded cavity during lamination or sintering, which leads to a better performance of the sensor. A greater sensitivity of the sensor, comparing with its predecessors, is showed during measurement. Finally ways for future optimization are proposed.
Bibliographical noteFunding Information:
The research was supported by the National Basic Research Program of China (973 Program) under the Grant of No. 2010CB334703 . Additionally, the research was also supported by National Natural Science Foundation of China under Grant of No. 51075375 .
- Capacitive pressure sensor Wireless Low temperature co-fired ceramic (LTCC) Harsh environment Sacrifice paste