Well-aligned and suspended single-walled carbon nanotube film: Directed self-assembly, patterning, and characterization

Miao Lu; Min Woo Jang; Greg Haugstad; Stephen A. Campbell; Tianhong Cui

doi:10.1063/1.3151850

Well-aligned and suspended single-walled carbon nanotube film: Directed self-assembly, patterning, and characterization

Miao Lu, Min Woo Jang, Greg Haugstad, Stephen A. Campbell, Tianhong Cui

Research output: Contribution to journal › Article › peer-review

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Abstract

Self-assembly process, patterning, and characterization of well-aligned single-walled carbon nanotube (SWNT) films are presented in this letter. The dc current in an ac dielectrophoresis of an SWNT solution was measured and used to control the self-assembly process to get an oriented, compact SWNT film 15-20 nm thick. The film was further patterned to form submicron beams by focused ion beams, or lithography and oxygen plasma etching. The Young's modulus of the film ranged from 350 to 830 GPa. The electrical resistivity was about 8.7× 10^-3cm. The temperature coefficient of resistance was -1.2%/K.

Original language	English (US)
Article number	261903
Journal	Applied Physics Letters
Volume	94
Issue number	26
DOIs	https://doi.org/10.1063/1.3151850
State	Published - 2009

Bibliographical note

Funding Information:
This work was partially supported by the DARPA NEMS Program. We also acknowledge the Nanofabrication Center and the Characterization at the University of Minnesota Facility, which are supported by NSF through NNIN. In particular, we thank Dr. Jinping Dong for the valuable discussion and help on the characterization of SWNT alignment using Raman microscope. DARPA through SPAWAR Grant No. N66001–07–1–2060; NSF NNIN is Grant No. ECS-0335765.

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title = "Well-aligned and suspended single-walled carbon nanotube film: Directed self-assembly, patterning, and characterization",

abstract = "Self-assembly process, patterning, and characterization of well-aligned single-walled carbon nanotube (SWNT) films are presented in this letter. The dc current in an ac dielectrophoresis of an SWNT solution was measured and used to control the self-assembly process to get an oriented, compact SWNT film 15-20 nm thick. The film was further patterned to form submicron beams by focused ion beams, or lithography and oxygen plasma etching. The Young's modulus of the film ranged from 350 to 830 GPa. The electrical resistivity was about 8.7× 10-3cm. The temperature coefficient of resistance was -1.2%/K.",

author = "Miao Lu and Jang, {Min Woo} and Greg Haugstad and Campbell, {Stephen A.} and Tianhong Cui",

note = "Funding Information: This work was partially supported by the DARPA NEMS Program. We also acknowledge the Nanofabrication Center and the Characterization at the University of Minnesota Facility, which are supported by NSF through NNIN. In particular, we thank Dr. Jinping Dong for the valuable discussion and help on the characterization of SWNT alignment using Raman microscope. DARPA through SPAWAR Grant No. N66001–07–1–2060; NSF NNIN is Grant No. ECS-0335765.",

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doi = "10.1063/1.3151850",

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journal = "Applied Physics Letters",

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AU - Jang, Min Woo

AU - Haugstad, Greg

AU - Campbell, Stephen A.

AU - Cui, Tianhong

N1 - Funding Information: This work was partially supported by the DARPA NEMS Program. We also acknowledge the Nanofabrication Center and the Characterization at the University of Minnesota Facility, which are supported by NSF through NNIN. In particular, we thank Dr. Jinping Dong for the valuable discussion and help on the characterization of SWNT alignment using Raman microscope. DARPA through SPAWAR Grant No. N66001–07–1–2060; NSF NNIN is Grant No. ECS-0335765.

PY - 2009

Y1 - 2009

N2 - Self-assembly process, patterning, and characterization of well-aligned single-walled carbon nanotube (SWNT) films are presented in this letter. The dc current in an ac dielectrophoresis of an SWNT solution was measured and used to control the self-assembly process to get an oriented, compact SWNT film 15-20 nm thick. The film was further patterned to form submicron beams by focused ion beams, or lithography and oxygen plasma etching. The Young's modulus of the film ranged from 350 to 830 GPa. The electrical resistivity was about 8.7× 10-3cm. The temperature coefficient of resistance was -1.2%/K.

AB - Self-assembly process, patterning, and characterization of well-aligned single-walled carbon nanotube (SWNT) films are presented in this letter. The dc current in an ac dielectrophoresis of an SWNT solution was measured and used to control the self-assembly process to get an oriented, compact SWNT film 15-20 nm thick. The film was further patterned to form submicron beams by focused ion beams, or lithography and oxygen plasma etching. The Young's modulus of the film ranged from 350 to 830 GPa. The electrical resistivity was about 8.7× 10-3cm. The temperature coefficient of resistance was -1.2%/K.

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Well-aligned and suspended single-walled carbon nanotube film: Directed self-assembly, patterning, and characterization

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