Waveguide optical micromachined ultrasound transducer (WOMUT) for high frequency ultrasound detection

Mohammad Amin Tadayon, Shai Ashkenazi, Matha Elizabeth Baylor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We introduce a new method to increase the sensitivity of an optical ultrasound receiver by utilizing a waveguide between the mirrors of the Fabry-Perot resonator. This approach eliminates diffraction loss from the cavity and therefore the finesse is only limited by mirror loss and absorption. Recently, we have reported our measurements of high finesse (695) and quality factor (59000) in a waveguide Fabry-Perot film resonator of 100 μm thickness. Here we describe the implementation of this method for the design of a thin film ultrasound detector. By applying this method, we have achieved noise equivalent pressure of 178 Pa over a bandwidth of 30 MHz which is 20 folds better than the sensitivity of our previous non-waveguide detector.

Original languageEnglish (US)
Title of host publicationIEEE International Ultrasonics Symposium, IUS
PublisherIEEE Computer Society
Pages963-966
Number of pages4
ISBN (Electronic)9781479970490
DOIs
StatePublished - Oct 20 2014
Event2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: Sep 3 2014Sep 6 2014

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2014 IEEE International Ultrasonics Symposium, IUS 2014
CountryUnited States
CityChicago
Period9/3/149/6/14

Keywords

  • OMUT
  • Optical micromachined ultrasound transducer
  • Ultrasound detector
  • Waveguide Fabry-Perot resonator

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  • Cite this

    Tadayon, M. A., Ashkenazi, S., & Baylor, M. E. (2014). Waveguide optical micromachined ultrasound transducer (WOMUT) for high frequency ultrasound detection. In IEEE International Ultrasonics Symposium, IUS (pp. 963-966). [6931878] (IEEE International Ultrasonics Symposium, IUS). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2014.0236