Waveguide optical micromachined ultrasound transducer (WOMUT) for high frequency ultrasound detection

Mohammad Amin Tadayon; Shai Ashkenazi; Matha Elizabeth Baylor

doi:10.1109/ULTSYM.2014.0236

Waveguide optical micromachined ultrasound transducer (WOMUT) for high frequency ultrasound detection

Mohammad Amin Tadayon, Shai Ashkenazi, Matha Elizabeth Baylor

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

We introduce a new method to increase the sensitivity of an optical ultrasound receiver by utilizing a waveguide between the mirrors of the Fabry-Perot resonator. This approach eliminates diffraction loss from the cavity and therefore the finesse is only limited by mirror loss and absorption. Recently, we have reported our measurements of high finesse (695) and quality factor (59000) in a waveguide Fabry-Perot film resonator of 100 μm thickness. Here we describe the implementation of this method for the design of a thin film ultrasound detector. By applying this method, we have achieved noise equivalent pressure of 178 Pa over a bandwidth of 30 MHz which is 20 folds better than the sensitivity of our previous non-waveguide detector.

Original language	English (US)
Title of host publication	IEEE International Ultrasonics Symposium, IUS
Publisher	IEEE Computer Society
Pages	963-966
Number of pages	4
ISBN (Electronic)	9781479970490
DOIs	https://doi.org/10.1109/ULTSYM.2014.0236
State	Published - Oct 20 2014
Event	2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States Duration: Sep 3 2014 → Sep 6 2014

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Other

Other	2014 IEEE International Ultrasonics Symposium, IUS 2014
Country/Territory	United States
City	Chicago
Period	9/3/14 → 9/6/14

Bibliographical note

Publisher Copyright:
© 2014 IEEE.

Keywords

OMUT
Optical micromachined ultrasound transducer
Ultrasound detector
Waveguide Fabry-Perot resonator

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10.1109/ULTSYM.2014.0236

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Waveguide optical micromachined ultrasound transducer (WOMUT) for high frequency ultrasound detection. / Tadayon, Mohammad Amin; Ashkenazi, Shai; Baylor, Matha Elizabeth.
IEEE International Ultrasonics Symposium, IUS. IEEE Computer Society, 2014. p. 963-966 6931878 (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tadayon, MA, Ashkenazi, S & Baylor, ME 2014, Waveguide optical micromachined ultrasound transducer (WOMUT) for high frequency ultrasound detection. in IEEE International Ultrasonics Symposium, IUS., 6931878, IEEE International Ultrasonics Symposium, IUS, IEEE Computer Society, pp. 963-966, 2014 IEEE International Ultrasonics Symposium, IUS 2014, Chicago, United States, 9/3/14. https://doi.org/10.1109/ULTSYM.2014.0236

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abstract = "We introduce a new method to increase the sensitivity of an optical ultrasound receiver by utilizing a waveguide between the mirrors of the Fabry-Perot resonator. This approach eliminates diffraction loss from the cavity and therefore the finesse is only limited by mirror loss and absorption. Recently, we have reported our measurements of high finesse (695) and quality factor (59000) in a waveguide Fabry-Perot film resonator of 100 μm thickness. Here we describe the implementation of this method for the design of a thin film ultrasound detector. By applying this method, we have achieved noise equivalent pressure of 178 Pa over a bandwidth of 30 MHz which is 20 folds better than the sensitivity of our previous non-waveguide detector.",

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N2 - We introduce a new method to increase the sensitivity of an optical ultrasound receiver by utilizing a waveguide between the mirrors of the Fabry-Perot resonator. This approach eliminates diffraction loss from the cavity and therefore the finesse is only limited by mirror loss and absorption. Recently, we have reported our measurements of high finesse (695) and quality factor (59000) in a waveguide Fabry-Perot film resonator of 100 μm thickness. Here we describe the implementation of this method for the design of a thin film ultrasound detector. By applying this method, we have achieved noise equivalent pressure of 178 Pa over a bandwidth of 30 MHz which is 20 folds better than the sensitivity of our previous non-waveguide detector.

AB - We introduce a new method to increase the sensitivity of an optical ultrasound receiver by utilizing a waveguide between the mirrors of the Fabry-Perot resonator. This approach eliminates diffraction loss from the cavity and therefore the finesse is only limited by mirror loss and absorption. Recently, we have reported our measurements of high finesse (695) and quality factor (59000) in a waveguide Fabry-Perot film resonator of 100 μm thickness. Here we describe the implementation of this method for the design of a thin film ultrasound detector. By applying this method, we have achieved noise equivalent pressure of 178 Pa over a bandwidth of 30 MHz which is 20 folds better than the sensitivity of our previous non-waveguide detector.

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Waveguide optical micromachined ultrasound transducer (WOMUT) for high frequency ultrasound detection

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