Abstract
A system for the linearization of voltage contrast in the scanning electron microscope for potentials between +or-10V is described. The linearization is achieved by using two concentric hemispherical grids which form a retarding field analyser with the specimen at the centre of the grids. Collection is by either a solid hemispherical cup, or alternatively the conventional scintillator cage. Results are presented for both cases. A discussion of the minimum detectable potential in terms of the beam current and equivalent noise current is also included.
Original language | English (US) |
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Article number | 020 |
Pages (from-to) | 930-933 |
Number of pages | 4 |
Journal | Journal of Physics E: Scientific Instruments |
Volume | 7 |
Issue number | 11 |
DOIs | |
State | Published - Dec 1 1974 |