Vertically Integrated Nanowires on Si Wafers and Into Circuits

Allison Harpel, Joseph Um, Aditya Dave, Yali Zhang, Nikita Mahjabeen, Yicong Chen, Rashaunda Henderson, Rhonda Franklin, Bethanie J.H. Stadler

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Vertically integrated copper (Cu) and nickel (Ni) nanowires (NWS) were fabricated on silicon using anodized aluminum oxide (AAO) thin film templates integrated onto silicon wafers. Both the AAO and NWs were mechanically robust and demonstrated to withstand further fabrication processes used for integrated circuits. The AAO pores were measured to be 30 nm with size distributions narrowing from ±12 to ±6 nm after a second anodization. The NWs, therefore, had similar diameters and distributions inside these integrated AAO films. Magnetic hysteresis loops demonstrated the out-of-plane anisotropy of the vertically oriented Ni wires in the presence of pore outgrowth that had in-plane anisotropy. When used as vias and integrated with coplanar waveguides (CPWs), the Cu NWs had lower losses than standard vias above 60 GHz.

Original languageEnglish (US)
Article number3200505
JournalIEEE Transactions on Magnetics
Issue number3
StatePublished - Mar 1 2023

Bibliographical note

Publisher Copyright:
© 1965-2012 IEEE.


  • Fabrication process
  • magnetic hysteresis magnetic nanowire (NW)
  • microwave integrated circuit

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