Use of a synchrotron X-ray microbeam to map composition and structure of multimetallic metal oxide films deposited by combinatorial chemical vapor deposition

Bin Xia, Yong S. Chu, Wayne L. Gladfelter

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Using anhydrous metal nitrates as single source precursors, combinatorial chemical vapor deposition was used to create compositional gradients in the bimetallic ZrO2/HfO2 system and the trimetallic ZrO2/HfO2/SnO2 system. Composition and structural information were probed simultaneously by measuring the fluorescence and diffraction resulting from exposure of the film to a 30 μm diameter X-ray beam at the Advanced Photon Source. The higher resolution made possible by the small beam size provided an accurate map of composition and structure. In the homologous zirconia-hafnia series a decrease in lattice constants and a change in film texture was observed as a function of increased Hf concentration. As reported elsewhere, at intermediate compositions, gradients involving ZrO2 and SnO2 or HfO2 and SnO2 give rise to a crystalline phase(α-PbO2 structure type) that differs from that found for either of the end members. The simultaneous measurement of fluorescence and diffraction coupled with the small spot X-ray source provides a more accurate correlation between composition and structure.

Original languageEnglish (US)
Pages (from-to)9041-9045
Number of pages5
JournalSurface and Coatings Technology
Volume201
Issue number22-23 SPEC. ISS.
DOIs
StatePublished - Sep 25 2007

Keywords

  • CVD
  • Combinatorial
  • Hafnia
  • Tin oxide
  • Zirconia

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