Undergraduate instructional course on microelectromechanical systems fabrication

Dennis L. Polla, William P Robbins, Daniel Glumac, Lorraine F Francis, Arthur G Erdman

Research output: Contribution to journalConference articlepeer-review

7 Scopus citations


A one-quarter instructional course concerned with the design and fabrication of microelectromechanical system (MEMS) devices is described. This course is taught starting with a beginning perspective of basic silicon processing techniques, and it advances to demonstrate how such processing methods can lead to fabricated MEMS devices. Several key components are integrated in this course: 1) hands-on fabrication of micromechanical motor structures in a Class 100 cleanroom, 2) approximately 30 hours of entry-level classroom lecture on solid-state micromachining and related fabrication technologies, 3) testing and analysis of finished structures and devices, and 4) weekly discussions of fabrication results and MEMS work being carried out at other institutions.

Original languageEnglish (US)
Pages (from-to)297-301
Number of pages5
JournalProceedings - Frontiers in Education Conference
StatePublished - Dec 1 1994
EventProceedings of the 1994 24th Annual Conference on Frontiers in Education - San Jose, CA, USA
Duration: Nov 2 1994Nov 6 1994


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