Trace heavy metal ions are probable carcinogens with concentrations at ppb levels. Ion selective electrode (ISE) technology is a conventional and widely used method to detect various ions with the advantages as rapid measurement, low power consumption and low cost. However, the detection limit of a conventional bulky ISE device is only able to reach ppm level so far, not sensitive enough for practically detecting heavy metal ions. A micro ion selective electrode (μISE) array which can realize multiplex detection of heavy metal ions on one chip is reported in this paper. Its detection limit for Pb 2+ , Cd 2+ , AsO 2 − , and Hg 2+ can reach 1, 3, 10, and 1 ppb, respectively, within the permissible limits of drinking water. The micrometer scale device arrays from microfabrication processes demonstrated enhanced sensitivity, uniformity, and reduced response time (18 s) compared to conventional ISE. Our devices showed superb selectivity, and the performance dependence on temperature and pH values was investigated as well.