Abstract
A piezoelectric aluminum nitride film on oxidized silicon wafer is used to realize high frequency surface acoustic wave devices. Optical ring resonator is integrated with the surface acoustic wave device to demonstrate a high speed acousto-optic modulation.
| Original language | English (US) |
|---|---|
| Title of host publication | 2014 Conference on Lasers and Electro-Optics, CLEO 2014 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Volume | 2014-January |
| State | Published - Jan 1 2014 |
| Event | 2014 Conference on Lasers and Electro-Optics, CLEO 2014 - San Jose, United States Duration: Jun 8 2014 → Jun 13 2014 |
Other
| Other | 2014 Conference on Lasers and Electro-Optics, CLEO 2014 |
|---|---|
| Country/Territory | United States |
| City | San Jose |
| Period | 6/8/14 → 6/13/14 |