Abstract
A simple walker is described that is suitable as the coarse positioner in a scanning tunneling microscope. The walker is fabricated from a single piece of piezoelectric ceramic and has feet coated with thin metal and insulating films. The walker can move in either of two orthogonal, horizontal directions on an insulated, metallized quartz substrate in steps that can be varied from 25 to 400 nm.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2168-2170 |
| Number of pages | 3 |
| Journal | Review of Scientific Instruments |
| Volume | 56 |
| Issue number | 11 |
| DOIs | |
| State | Published - 1985 |