Two-dimensional mapping of electron distribution functions in low pressure ICP

B. Heil; U. Kortshagen

doi:10.1109/27.763032

Two-dimensional mapping of electron distribution functions in low pressure ICP

B. Heil, U. Kortshagen

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Two-dimensionally resolved Langmuir probe measurements of electron distribution functions (EDF) have been performed in a low pressure inductively coupled plasma. The measurements confirm nonlocal behavior of the EDF at low pressures while deviations from the nonlocality of the EDF are observed at higher pressures. The experimental results are discussed in terms of the energy relaxation length of the electrons.

Original language	English (US)
Pages (from-to)	56-57
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	27
Issue number	1
DOIs	https://doi.org/10.1109/27.763032
State	Published - 1999

Bibliographical note

Funding Information:
Manuscript received July 1, 1998. This work was supported by the National Science Foundation under Grant ECS-9713137. The authors are with the Department of Mechanical Engineering, University of Minnesota, Minneapolis, MN 55455 USA (e-mail: [email protected]). Publisher Item Identifier S 0093-3813(99)02413-3.

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@article{8dc33f9fbf85406a8bec5d08dbfd8539,

title = "Two-dimensional mapping of electron distribution functions in low pressure ICP",

abstract = "Two-dimensionally resolved Langmuir probe measurements of electron distribution functions (EDF) have been performed in a low pressure inductively coupled plasma. The measurements confirm nonlocal behavior of the EDF at low pressures while deviations from the nonlocality of the EDF are observed at higher pressures. The experimental results are discussed in terms of the energy relaxation length of the electrons.",

author = "B. Heil and U. Kortshagen",

note = "Funding Information: Manuscript received July 1, 1998. This work was supported by the National Science Foundation under Grant ECS-9713137. The authors are with the Department of Mechanical Engineering, University of Minnesota, Minneapolis, MN 55455 USA (e-mail: [email protected]). Publisher Item Identifier S 0093-3813(99)02413-3.",

year = "1999",

doi = "10.1109/27.763032",

language = "English (US)",

volume = "27",

pages = "56--57",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1",

}

TY - JOUR

T1 - Two-dimensional mapping of electron distribution functions in low pressure ICP

AU - Heil, B.

AU - Kortshagen, U.

N1 - Funding Information: Manuscript received July 1, 1998. This work was supported by the National Science Foundation under Grant ECS-9713137. The authors are with the Department of Mechanical Engineering, University of Minnesota, Minneapolis, MN 55455 USA (e-mail: [email protected]). Publisher Item Identifier S 0093-3813(99)02413-3.

PY - 1999

Y1 - 1999

N2 - Two-dimensionally resolved Langmuir probe measurements of electron distribution functions (EDF) have been performed in a low pressure inductively coupled plasma. The measurements confirm nonlocal behavior of the EDF at low pressures while deviations from the nonlocality of the EDF are observed at higher pressures. The experimental results are discussed in terms of the energy relaxation length of the electrons.

AB - Two-dimensionally resolved Langmuir probe measurements of electron distribution functions (EDF) have been performed in a low pressure inductively coupled plasma. The measurements confirm nonlocal behavior of the EDF at low pressures while deviations from the nonlocality of the EDF are observed at higher pressures. The experimental results are discussed in terms of the energy relaxation length of the electrons.

UR - http://www.scopus.com/inward/record.url?scp=0032663987&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032663987&partnerID=8YFLogxK

U2 - 10.1109/27.763032

DO - 10.1109/27.763032

M3 - Article

AN - SCOPUS:0032663987

SN - 0093-3813

VL - 27

SP - 56

EP - 57

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 1

ER -

Two-dimensional mapping of electron distribution functions in low pressure ICP

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