Two-dimensionally resolved Langmuir probe measurements of electron distribution functions (EDF) have been performed in a low pressure inductively coupled plasma. The measurements confirm nonlocal behavior of the EDF at low pressures while deviations from the nonlocality of the EDF are observed at higher pressures. The experimental results are discussed in terms of the energy relaxation length of the electrons.
Bibliographical noteFunding Information:
Manuscript received July 1, 1998. This work was supported by the National Science Foundation under Grant ECS-9713137. The authors are with the Department of Mechanical Engineering, University of Minnesota, Minneapolis, MN 55455 USA (e-mail: email@example.com). Publisher Item Identifier S 0093-3813(99)02413-3.