Travel range extension of a MEMS electrostatic microactuator

Keyphrases

• Micro-electro-mechanical Systems 100%
• Actuator 100%
• Range Extension 100%
• Electrostatic Microactuators 100%
• Travel Range 100%
• Nonlinear Dynamics 66%
• Deep Reactive Ion Etching 66%
• Comb Fingers 66%
• Control System 33%
• Subcellular Structure 33%
• Position Tracking 33%
• Large Molecules 33%
• Stiffness 33%
• Tracking Performance 33%
• Electrostatic Force 33%
• Inversion Method 33%
• Fundamental Limitations 33%
• System Parameters 33%
• Nonlinear Model 33%
• Adaptive Controller 33%
• Fabrication Error 33%
• Wide Frequency Band 33%
• High Aspect Ratio 33%
• Active Control System 33%
• Model Inversion 33%
• Biological Cells 33%
• Pull-in Instability 33%
• Silicon-on-insulator Wafer 33%
• Mechanical Design Parameters 33%
• Allowable Range 33%
• Microassembly 33%
• Low Actuation Voltage 33%
• Microactuators 33%
• Fabricated Device 33%
• Goods Tracking 33%

Engineering

• Microelectromechanical System 100%
• Electrostatic Force 100%
• Actuator 75%
• Control Systems 50%
• Non-Linear Dynamics 50%
• Deep Reactive Ion Etching 50%
• Tracking (Position) 25%
• Design Parameter 25%
• Experimental Result 25%
• Inversion Technique 25%
• Potential Application 25%
• Adaptive Controller 25%
• Silicon on Insulator 25%
• System Parameter 25%
• Nonlinear Model 25%
• Mechanical Design 25%
• Subcellular 25%
• Active Control 25%
• Actuation 25%
• High Aspect Ratio 25%
• Rigidity 25%

Physics

• Electrostatics 100%
• Microelectromechanical System 100%
• Actuator 75%
• Non-Linear Dynamics 50%
• Active Control 25%
• Aspect Ratio 25%
• Tracking (Position) 25%