Top-down nanofabrication of silicon nanoribbon field effect transistor (Si-NR FET) for carcinoembryonic antigen detection

Zengtao Bao, Jialin Sun, Xiaoqian Zhao, Zengyao Li, Songkui Cui, Qingyang Meng, Ye Zhang, Tong Wang, Yanfeng Jiang

Research output: Contribution to journalArticlepeer-review

26 Scopus citations


Sensitive and quantitative detection of tumor markers is highly required in the clinic for cancer diagnosis and consequent treatment. A field-effect transistor-based (FET-based) nanobiosensor emerges with characteristics of being label-free, real-time, having high sensitivity, and providing direct electrical readout for detection of biomarkers. In this paper, a top–down approach is proposed and implemented to fulfill a novel silicon nano-ribbon FET, which acts as biomarker sensor for future clinical application. Compared with the bottom–up approach, a top–down fabrication approach can confine width and length of the silicon FET precisely to control its electrical properties. The silicon nanoribbon (Si-NR) transistor is fabricated on a Silicon-on-Insulator (SOI) substrate by a top–down approach with complementary metal oxide semiconductor (CMOS)-compatible technology. After the preparation, the surface of Si-NR is functionalized with 3-aminopropyltriethoxysilane (APTES). Glutaraldehyde is utilized to bind the amino terminals of APTES and antibody on the surface. Finally, a microfluidic channel is integrated on the top of the device, acting as a flowing channel for the carcinoembryonic antigen (CEA) solution. The Si-NR FET is 120 nm in width and 25 nm in height, with ambipolar electrical characteristics. A logarithmic relationship between the changing ratio of the current and the CEA concentration is measured in the range of 0.1–100 ng/mL. The sensiti vity of detection is measured as 10 pg/mL. The top–down fabricated biochip shows feasibility in direct detecting of CEA with the benefits of real-time, low cost, and high sensitivity as a promising biosensor for tumor early diagnosis.

Original languageEnglish (US)
Pages (from-to)4623-4631
Number of pages9
JournalInternational Journal of Nanomedicine
StatePublished - Jun 27 2017

Bibliographical note

Funding Information:
This work was supported by grants from the National Natural Science Foundation of China (no 81371683/H1819), Clinical Medicine Project of Jiangsu Province (no BL2014023), and Young Talents Hausen Fund of Lianyungang Clinical College in China (no QN160304).

Publisher Copyright:
© 2017 Bao et al.


  • Carcinoembryonic antigen
  • Field-effect transistor
  • Microfluidic channel
  • Nanoribbon
  • Silicon nanobiosensor


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