Abstract
We measured the temporal dynamics of electron properties of laser-produced plasmas generated in atmospheric pressure argon and in argon with 3% of water vapor. The optical plasmas were generated leveraging the fundamental near-infrared wavelength of nanosecond pulsed Nd:YAG lasers under intensities comparable to those deployed in extreme ultraviolet lithography machines. Time-resolved laser Thomson scattering measurements of the electron number densities and electron temperatures revealed very similar trends in Ar and Ar- H2O. Peak electron number density and electron temperature about 2 × 1017 cm−3 and 7 eV, respectively were measured. Interestingly, long-lived electrons were observed up to 40 µs after the plasma inception. Electron number density results inferred from Thomson scattering measurements were compared with those inferred from optical emission spectroscopy, relying on the Stark broadenings of the Hα and Hβ transitions.
| Original language | English (US) |
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| Title of host publication | AIAA Science and Technology Forum and Exposition, AIAA SciTech Forum 2025 |
| Publisher | American Institute of Aeronautics and Astronautics Inc, AIAA |
| ISBN (Print) | 9781624107238 |
| DOIs | |
| State | Published - 2025 |
| Event | AIAA Science and Technology Forum and Exposition, AIAA SciTech Forum 2025 - Orlando, United States Duration: Jan 6 2025 → Jan 10 2025 |
Publication series
| Name | AIAA Science and Technology Forum and Exposition, AIAA SciTech Forum 2025 |
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Conference
| Conference | AIAA Science and Technology Forum and Exposition, AIAA SciTech Forum 2025 |
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| Country/Territory | United States |
| City | Orlando |
| Period | 1/6/25 → 1/10/25 |
Bibliographical note
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