Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates
- Sven Hofmann
- , Koen Van Gils
- , Steven Van Der Linden
- , Sylvain Iseni
- , Peter Bruggeman
Research output: Contribution to journal › Article › peer-review
39
Link opens in a new tab
Scopus
citations