Three-Dimensional Integration of Black Phosphorus Photodetector with Silicon Photonics and Nanoplasmonics

Che Chen, Nathan Youngblood, Ruoming Peng, Daehan Yoo, Daniel A. Mohr, Timothy W. Johnson, Sang Hyun Oh, Mo Li

Research output: Contribution to journalArticlepeer-review

78 Scopus citations

Abstract

We demonstrate the integration of a black phosphorus photodetector in a hybrid, three-dimensional architecture of silicon photonics and metallic nanoplasmonics structures. This integration approach combines the advantages of the low propagation loss of silicon waveguides, high-field confinement of a plasmonic nanogap, and the narrow bandgap of black phosphorus to achieve high responsivity for detection of telecom-band, near-infrared light. Benefiting from an ultrashort channel (∼60 nm) and near-field enhancement enabled by the nanogap structure, the photodetector shows an intrinsic responsivity as high as 10 A/W afforded by internal gain mechanisms, and a 3 dB roll-off frequency of 150 MHz. This device demonstrates a promising approach for on-chip integration of three distinctive photonic systems, which, as a generic platform, may lead to future nanophotonic applications for biosensing, nonlinear optics, and optical signal processing.

Original languageEnglish (US)
Pages (from-to)985-991
Number of pages7
JournalNano letters
Volume17
Issue number2
DOIs
StatePublished - Feb 8 2017

Keywords

  • black phosphorus
  • extraordinary optical transmission
  • nanogap
  • photodetector
  • plasmonics
  • Silicon photonics

How much support was provided by MRSEC?

  • Shared

Reporting period for MRSEC

  • Period 3

PubMed: MeSH publication types

  • Letter

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