Three-Dimensional Integration of Black Phosphorus Photodetector with Silicon Photonics and Nanoplasmonics

Che Chen; Nathan Youngblood; Ruoming Peng; Daehan Yoo; Daniel A. Mohr; Timothy W. Johnson; Sang Hyun Oh; Mo Li

doi:10.1021/acs.nanolett.6b04332

Three-Dimensional Integration of Black Phosphorus Photodetector with Silicon Photonics and Nanoplasmonics

Che Chen, Nathan Youngblood, Ruoming Peng, Daehan Yoo, Daniel A. Mohr, Timothy W. Johnson, Sang Hyun Oh, Mo Li

Research output: Contribution to journal › Article › peer-review

103 Scopus citations

Abstract

We demonstrate the integration of a black phosphorus photodetector in a hybrid, three-dimensional architecture of silicon photonics and metallic nanoplasmonics structures. This integration approach combines the advantages of the low propagation loss of silicon waveguides, high-field confinement of a plasmonic nanogap, and the narrow bandgap of black phosphorus to achieve high responsivity for detection of telecom-band, near-infrared light. Benefiting from an ultrashort channel (∼60 nm) and near-field enhancement enabled by the nanogap structure, the photodetector shows an intrinsic responsivity as high as 10 A/W afforded by internal gain mechanisms, and a 3 dB roll-off frequency of 150 MHz. This device demonstrates a promising approach for on-chip integration of three distinctive photonic systems, which, as a generic platform, may lead to future nanophotonic applications for biosensing, nonlinear optics, and optical signal processing.

Original language	English (US)
Pages (from-to)	985-991
Number of pages	7
Journal	Nano letters
Volume	17
Issue number	2
DOIs	https://doi.org/10.1021/acs.nanolett.6b04332
State	Published - Feb 8 2017

Bibliographical note

Funding Information:
This work was supported by the Air Force Office of Scientific Research (Award No. FA9550-14-1-0277; C.C., N.Y., R.P., M.L.) and the National Science Foundation (Award No. ECCS-1351002 for C.C., N.Y., R.P. M.L.; ECCS-1610333 for D.Y., D.A.M., T.W.J., S.-H.O.). D.A.M. also acknowledges support from the NIH Biotechnology Training Grant (T32 GM008347). Device fabrication was carried out at the University of Minnesota Nanofabrication Center which receives partial support from the NSF through the National Nanotechnology Coordinated Infrastructure (NNCI) program. The authors also used resources at the Characterization Facility, which is a member of the NSF-funded Materials Research Facilities Network via the NSF MRSEC program.

Publisher Copyright:
© 2017 American Chemical Society.

Keywords

black phosphorus
extraordinary optical transmission
nanogap
photodetector
plasmonics
Silicon photonics

MRSEC Support

Shared

PubMed: MeSH publication types

Letter

Publisher link

10.1021/acs.nanolett.6b04332

Find It

Find It at U of M Libraries

Cite this

@article{ad8947bb0da941979946e3b807bf1053,

title = "Three-Dimensional Integration of Black Phosphorus Photodetector with Silicon Photonics and Nanoplasmonics",

abstract = "We demonstrate the integration of a black phosphorus photodetector in a hybrid, three-dimensional architecture of silicon photonics and metallic nanoplasmonics structures. This integration approach combines the advantages of the low propagation loss of silicon waveguides, high-field confinement of a plasmonic nanogap, and the narrow bandgap of black phosphorus to achieve high responsivity for detection of telecom-band, near-infrared light. Benefiting from an ultrashort channel (∼60 nm) and near-field enhancement enabled by the nanogap structure, the photodetector shows an intrinsic responsivity as high as 10 A/W afforded by internal gain mechanisms, and a 3 dB roll-off frequency of 150 MHz. This device demonstrates a promising approach for on-chip integration of three distinctive photonic systems, which, as a generic platform, may lead to future nanophotonic applications for biosensing, nonlinear optics, and optical signal processing.",

keywords = "black phosphorus, extraordinary optical transmission, nanogap, photodetector, plasmonics, Silicon photonics",

author = "Che Chen and Nathan Youngblood and Ruoming Peng and Daehan Yoo and Mohr, {Daniel A.} and Johnson, {Timothy W.} and Oh, {Sang Hyun} and Mo Li",

note = "Funding Information: This work was supported by the Air Force Office of Scientific Research (Award No. FA9550-14-1-0277; C.C., N.Y., R.P., M.L.) and the National Science Foundation (Award No. ECCS-1351002 for C.C., N.Y., R.P. M.L.; ECCS-1610333 for D.Y., D.A.M., T.W.J., S.-H.O.). D.A.M. also acknowledges support from the NIH Biotechnology Training Grant (T32 GM008347). Device fabrication was carried out at the University of Minnesota Nanofabrication Center which receives partial support from the NSF through the National Nanotechnology Coordinated Infrastructure (NNCI) program. The authors also used resources at the Characterization Facility, which is a member of the NSF-funded Materials Research Facilities Network via the NSF MRSEC program. Publisher Copyright: {\textcopyright} 2017 American Chemical Society.",

year = "2017",

month = feb,

day = "8",

doi = "10.1021/acs.nanolett.6b04332",

language = "English (US)",

volume = "17",

pages = "985--991",

journal = "Nano letters",

issn = "1530-6984",

publisher = "American Chemical Society",

number = "2",

}

TY - JOUR

T1 - Three-Dimensional Integration of Black Phosphorus Photodetector with Silicon Photonics and Nanoplasmonics

AU - Chen, Che

AU - Youngblood, Nathan

AU - Peng, Ruoming

AU - Yoo, Daehan

AU - Mohr, Daniel A.

AU - Johnson, Timothy W.

AU - Oh, Sang Hyun

AU - Li, Mo

N1 - Funding Information: This work was supported by the Air Force Office of Scientific Research (Award No. FA9550-14-1-0277; C.C., N.Y., R.P., M.L.) and the National Science Foundation (Award No. ECCS-1351002 for C.C., N.Y., R.P. M.L.; ECCS-1610333 for D.Y., D.A.M., T.W.J., S.-H.O.). D.A.M. also acknowledges support from the NIH Biotechnology Training Grant (T32 GM008347). Device fabrication was carried out at the University of Minnesota Nanofabrication Center which receives partial support from the NSF through the National Nanotechnology Coordinated Infrastructure (NNCI) program. The authors also used resources at the Characterization Facility, which is a member of the NSF-funded Materials Research Facilities Network via the NSF MRSEC program. Publisher Copyright: © 2017 American Chemical Society.

PY - 2017/2/8

Y1 - 2017/2/8

N2 - We demonstrate the integration of a black phosphorus photodetector in a hybrid, three-dimensional architecture of silicon photonics and metallic nanoplasmonics structures. This integration approach combines the advantages of the low propagation loss of silicon waveguides, high-field confinement of a plasmonic nanogap, and the narrow bandgap of black phosphorus to achieve high responsivity for detection of telecom-band, near-infrared light. Benefiting from an ultrashort channel (∼60 nm) and near-field enhancement enabled by the nanogap structure, the photodetector shows an intrinsic responsivity as high as 10 A/W afforded by internal gain mechanisms, and a 3 dB roll-off frequency of 150 MHz. This device demonstrates a promising approach for on-chip integration of three distinctive photonic systems, which, as a generic platform, may lead to future nanophotonic applications for biosensing, nonlinear optics, and optical signal processing.

AB - We demonstrate the integration of a black phosphorus photodetector in a hybrid, three-dimensional architecture of silicon photonics and metallic nanoplasmonics structures. This integration approach combines the advantages of the low propagation loss of silicon waveguides, high-field confinement of a plasmonic nanogap, and the narrow bandgap of black phosphorus to achieve high responsivity for detection of telecom-band, near-infrared light. Benefiting from an ultrashort channel (∼60 nm) and near-field enhancement enabled by the nanogap structure, the photodetector shows an intrinsic responsivity as high as 10 A/W afforded by internal gain mechanisms, and a 3 dB roll-off frequency of 150 MHz. This device demonstrates a promising approach for on-chip integration of three distinctive photonic systems, which, as a generic platform, may lead to future nanophotonic applications for biosensing, nonlinear optics, and optical signal processing.

KW - black phosphorus

KW - extraordinary optical transmission

KW - nanogap

KW - photodetector

KW - plasmonics

KW - Silicon photonics

UR - http://www.scopus.com/inward/record.url?scp=85011958895&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85011958895&partnerID=8YFLogxK

U2 - 10.1021/acs.nanolett.6b04332

DO - 10.1021/acs.nanolett.6b04332

M3 - Article

C2 - 28072546

AN - SCOPUS:85011958895

SN - 1530-6984

VL - 17

SP - 985

EP - 991

JO - Nano letters

JF - Nano letters

IS - 2

ER -

Three-Dimensional Integration of Black Phosphorus Photodetector with Silicon Photonics and Nanoplasmonics

Abstract

Bibliographical note

Keywords

MRSEC Support

PubMed: MeSH publication types

Publisher link

Find It

Other files and links

Fingerprint

MRSEC SEED Projects DMR-1420013

University of Minnesota MRSEC (DMR-1420013)

Cite this