THIN FILM RESONATOR TECHNOLOGY.

K. M. Lakin, G. R. Kline, R. S. Ketcham, A. R. Landin, W. A. Burkland, K. T. McCarron, S. D. Braymen, S. G. Burns

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

An overview is presented of the development of thin-film-resonator (TFR)-based technology, including a discussion of materials, materials processing, and device physics. High-Q trapped energy resonators, low-insertion loss filters, and an integrated oscillator have been demonstrated and are reported. The future of TFR technology in the area of application-specific ICs as applied to communications, telemetry, sensors, and other high-frequency systems is examined.

Original languageEnglish (US)
Pages (from-to)371-381
Number of pages11
JournalProceedings of the Annual IEEE International Frequency Control Symposium
StatePublished - Dec 1 1987

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Resonators
Thin films
Telemetering
Insertion losses
Physics
Communication
Sensors
Processing

Cite this

Lakin, K. M., Kline, G. R., Ketcham, R. S., Landin, A. R., Burkland, W. A., McCarron, K. T., ... Burns, S. G. (1987). THIN FILM RESONATOR TECHNOLOGY. Proceedings of the Annual IEEE International Frequency Control Symposium, 371-381.

THIN FILM RESONATOR TECHNOLOGY. / Lakin, K. M.; Kline, G. R.; Ketcham, R. S.; Landin, A. R.; Burkland, W. A.; McCarron, K. T.; Braymen, S. D.; Burns, S. G.

In: Proceedings of the Annual IEEE International Frequency Control Symposium, 01.12.1987, p. 371-381.

Research output: Contribution to journalArticle

Lakin, KM, Kline, GR, Ketcham, RS, Landin, AR, Burkland, WA, McCarron, KT, Braymen, SD & Burns, SG 1987, 'THIN FILM RESONATOR TECHNOLOGY.', Proceedings of the Annual IEEE International Frequency Control Symposium, pp. 371-381.
Lakin KM, Kline GR, Ketcham RS, Landin AR, Burkland WA, McCarron KT et al. THIN FILM RESONATOR TECHNOLOGY. Proceedings of the Annual IEEE International Frequency Control Symposium. 1987 Dec 1;371-381.
Lakin, K. M. ; Kline, G. R. ; Ketcham, R. S. ; Landin, A. R. ; Burkland, W. A. ; McCarron, K. T. ; Braymen, S. D. ; Burns, S. G. / THIN FILM RESONATOR TECHNOLOGY. In: Proceedings of the Annual IEEE International Frequency Control Symposium. 1987 ; pp. 371-381.
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