Abstract
Bulk acoustic wave resonators using thin piezoelectric films of aluminum nitride and zinc oxide fabricated on Si, GaAs, and other substrates were investigated. Bandpass filters implemented using thin-film bulk-acoustic wave resonators (TFR) are examined. Three basic forms of TFR-based multipole filters are addressed that were synthesized for an integrated received front end for the global positioning satellite (GPS) system. These are the monolithic crystal filter (MCF), the ladder filter, and the stacked crystal filter (SCF). The resonators use C-axis vertical piezoelectric material to support longitudinal-mode wave propagation. Low insertion loss filters were demonstrated in the 1 to 2 GHz range for GPS applications. Performance characteristics of these filters are presented along with a brief discussion of the progress made in deriving filters from the piezoelectric TFR technology.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 371-375 |
| Number of pages | 5 |
| Journal | Ultrasonics Symposium Proceedings |
| State | Published - Dec 1 1986 |
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THIN FILM RESONATOR BASED LOW INSERTION LOSS FILTERS. / Lakin, K. M.; Kline, G. R.; Ketcham, R. S.; Burns, S. G.
In: Ultrasonics Symposium Proceedings, 01.12.1986, p. 371-375.Research output: Contribution to journal › Conference article
}
TY - JOUR
T1 - THIN FILM RESONATOR BASED LOW INSERTION LOSS FILTERS.
AU - Lakin, K. M.
AU - Kline, G. R.
AU - Ketcham, R. S.
AU - Burns, S. G.
PY - 1986/12/1
Y1 - 1986/12/1
N2 - Bulk acoustic wave resonators using thin piezoelectric films of aluminum nitride and zinc oxide fabricated on Si, GaAs, and other substrates were investigated. Bandpass filters implemented using thin-film bulk-acoustic wave resonators (TFR) are examined. Three basic forms of TFR-based multipole filters are addressed that were synthesized for an integrated received front end for the global positioning satellite (GPS) system. These are the monolithic crystal filter (MCF), the ladder filter, and the stacked crystal filter (SCF). The resonators use C-axis vertical piezoelectric material to support longitudinal-mode wave propagation. Low insertion loss filters were demonstrated in the 1 to 2 GHz range for GPS applications. Performance characteristics of these filters are presented along with a brief discussion of the progress made in deriving filters from the piezoelectric TFR technology.
AB - Bulk acoustic wave resonators using thin piezoelectric films of aluminum nitride and zinc oxide fabricated on Si, GaAs, and other substrates were investigated. Bandpass filters implemented using thin-film bulk-acoustic wave resonators (TFR) are examined. Three basic forms of TFR-based multipole filters are addressed that were synthesized for an integrated received front end for the global positioning satellite (GPS) system. These are the monolithic crystal filter (MCF), the ladder filter, and the stacked crystal filter (SCF). The resonators use C-axis vertical piezoelectric material to support longitudinal-mode wave propagation. Low insertion loss filters were demonstrated in the 1 to 2 GHz range for GPS applications. Performance characteristics of these filters are presented along with a brief discussion of the progress made in deriving filters from the piezoelectric TFR technology.
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M3 - Conference article
AN - SCOPUS:0022954824
SP - 371
EP - 375
JO - Journal of Fluid Mechanics
JF - Journal of Fluid Mechanics
SN - 0022-1120
ER -