THIN FILM RESONATOR BASED LOW INSERTION LOSS FILTERS.

K. M. Lakin, G. R. Kline, R. S. Ketcham, S. G. Burns

Research output: Contribution to journalConference article

16 Citations (Scopus)

Abstract

Bulk acoustic wave resonators using thin piezoelectric films of aluminum nitride and zinc oxide fabricated on Si, GaAs, and other substrates were investigated. Bandpass filters implemented using thin-film bulk-acoustic wave resonators (TFR) are examined. Three basic forms of TFR-based multipole filters are addressed that were synthesized for an integrated received front end for the global positioning satellite (GPS) system. These are the monolithic crystal filter (MCF), the ladder filter, and the stacked crystal filter (SCF). The resonators use C-axis vertical piezoelectric material to support longitudinal-mode wave propagation. Low insertion loss filters were demonstrated in the 1 to 2 GHz range for GPS applications. Performance characteristics of these filters are presented along with a brief discussion of the progress made in deriving filters from the piezoelectric TFR technology.

Original languageEnglish (US)
Pages (from-to)371-375
Number of pages5
JournalUltrasonics Symposium Proceedings
StatePublished - Dec 1 1986

Fingerprint

Insertion losses
Crystal filters
Resonators
Zinc Oxide
Thin films
Geographic Information Systems
Aluminum Oxide
Acoustic waves
Satellites
Ladder networks
Aluminum nitride
Piezoelectric materials
Bandpass filters
Zinc oxide
Technology
Wave propagation
Substrates
aluminum nitride
gallium arsenide

Cite this

THIN FILM RESONATOR BASED LOW INSERTION LOSS FILTERS. / Lakin, K. M.; Kline, G. R.; Ketcham, R. S.; Burns, S. G.

In: Ultrasonics Symposium Proceedings, 01.12.1986, p. 371-375.

Research output: Contribution to journalConference article

Lakin, K. M. ; Kline, G. R. ; Ketcham, R. S. ; Burns, S. G. / THIN FILM RESONATOR BASED LOW INSERTION LOSS FILTERS. In: Ultrasonics Symposium Proceedings. 1986 ; pp. 371-375.
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