Thickness-dependent thermal conductivity of mechanically exfoliated β -Ga 2 O 3 thin films

Yingying Zhang, Qun Su, Jie Zhu, Sandhaya Koirala, Steven J. Koester, Xiaojia Wang

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30 Scopus citations


Beta-phase gallium oxide (β-Ga2O3), the most thermally stable phase of Ga2O3, has stimulated great interest in power electronics due to its ultra-wide bandgap (∼4.9 eV) and high breakdown electric field. The relatively low thermal conductivity of β-Ga2O3, however, limits the device performance due to excessive temperature driven by self-heating. Recently, integrating β-Ga2O3 thin films on substrates with high thermal conductivities has been proposed to improve heat rejection and device reliability. In this work, we prepare high-quality single-crystal β-Ga2O3 thin films by mechanical exfoliation of bulk crystals and study their thermal transport properties. Both the anisotropic thermal conductivity of β-Ga2O3 bulk crystals and the thickness-dependent thermal conductivity of β-Ga2O3 thin films are measured using the time-domain thermoreflectance technique. The reduction in the thin-film thermal conductivity, compared to the bulk value, can be well explained by the size effect resulting from the enhanced phonon-boundary scattering when the film thickness decreases. This work not only provides fundamental insight into the thermal transport mechanisms for high-quality β-Ga2O3 thin films but also facilitates the design and optimization of β-Ga2O3-based electronic devices.

Original languageEnglish (US)
Article number202101
Pages (from-to)202101
JournalApplied Physics Letters
Issue number20
StatePublished - May 18 2020

Bibliographical note

Funding Information:
We gratefully acknowledge funding support from the National Science Foundation through the University of Minnesota MRSEC under Award No. DMR-1420013 and from the Minnesota Futures Grant. Sample preparation was conducted in the Minnesota Nano Center, which was supported by the NSF through the National Nano Coordinated Infrastructure Network (NNCI No. ECCS-1542202).

How much support was provided by MRSEC?

  • Primary


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