Abstract
An investigation of all-dielectric micromirrors was reported. A thermoelectrically controlled chip mount with a phase-measurement interference microscope was used to measure the thermal deformation of the micromirror. Thermally invariant coating design for all-dielectric micromirrors was also discussed. The observation showed that the deformation upon the temperature change was unchanged throughout the cycling process.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 72-73 |
| Number of pages | 2 |
| Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
| Volume | 1 |
| State | Published - Dec 1 2001 |
| Event | 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society - San Diego, CA, United States Duration: Nov 11 2001 → Nov 15 2001 |