Thermally invariant all-dielectric micromirrors

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Abstract

An investigation of all-dielectric micromirrors was reported. A thermoelectrically controlled chip mount with a phase-measurement interference microscope was used to measure the thermal deformation of the micromirror. Thermally invariant coating design for all-dielectric micromirrors was also discussed. The observation showed that the deformation upon the temperature change was unchanged throughout the cycling process.

Original languageEnglish (US)
Pages (from-to)72-73
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume1
StatePublished - Dec 1 2001
Event14th Annual Meeting of the IEEE Lasers and Electro-Optics Society - San Diego, CA, United States
Duration: Nov 11 2001Nov 15 2001

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