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Thermal stress analyses of multilayered films on substrates and cantilever beams for micro sensors and actuators
C. H. Hsueh, C. R. Luttrell,
T. Cui
Mechanical Engineering
Research output
:
Contribution to journal
›
Article
›
peer-review
42
Scopus citations
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Dive into the research topics of 'Thermal stress analyses of multilayered films on substrates and cantilever beams for micro sensors and actuators'. Together they form a unique fingerprint.
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Keyphrases
Cantilever Beam
100%
Film Layer
100%
Increased Reliability
11%
Microactuators
100%
Microsensor
100%
Multilayered Films
100%
Multilayered System
22%
Reliability Issues
11%
Si Substrate
11%
Silica
11%
Silicon Nitride
11%
SiO2 Film
22%
Stress Damage
11%
Thermal Stress
66%
Thermal Stress Analysis
100%
Thermomechanical
11%
Engineering
Actuator
100%
Cantilever Beam
100%
Closed Form
11%
Closed Form Solution
11%
Film Layer
100%
Induced Damage
11%
Microsensor
100%
Reliability Issue
11%
Si Substrate
11%
Silicon Dioxide
11%
Sio2 Film
22%
Thermal Stress
66%
Thermal Stress Analysis
100%