Thermal stress analyses of multilayered films on substrates and cantilever beams for micro sensors and actuators

C. H. Hsueh, C. R. Luttrell, T. Cui

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Fingerprint

Dive into the research topics of 'Thermal stress analyses of multilayered films on substrates and cantilever beams for micro sensors and actuators'. Together they form a unique fingerprint.

Keyphrases

Engineering