A thermal plasma process for the synthesis of nanoparticles and their immediate assembly into nanostructured films is discussed. In this process, known as hypersonic plasma particle deposition, a thermal plasma with injected precursors is expanded through a nozzle to nucleate nanoparticles, which are then inertially deposited onto a cooled substrate in vacuum. A lightly consolidated nanostructured film results. Particle and film diagnostics along with images of the plasma flow are used to explain the formation of nanostructured silicon carbide films by this process.
Bibliographical noteFunding Information:
Manuscript received June 26, 1998; revised October 21, 1998. This work was supported by NSF (CTS-9520147, ECD-87-21545) and the Minnesota Supercomputer Institute.