Abstract
It was suggested that under thermal conditions, carbon atoms may also act as growth monomers, given that the cold boundary layer above the growing film is adequately thin to permit transport of C atoms from the hot plasma to the film surface. The mechanisms proposed by Harris were extended for growth on (100) surface by methyl radicals to investigate the potential role of C atoms in diamond growth. A model was developed with a configuration that corresponded to a diamond CVD reactor. Calculations were made with terms corresponding to experimental inputs of hydrogen, methane and argon. The computation were then extended by a numerical experiment in which the fluid boundary layer thickness was lessened by increasing the velocity of the impinging plasma jet. The calculations predicted an increase in linear growth rate as the jet velocity is augmented.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 164 |
| Number of pages | 1 |
| Journal | IEEE International Conference on Plasma Science |
| State | Published - 1994 |
| Event | Proceedings of the IEEE International Conference on Plasma Science - Santa Fe, NM, USA Duration: Jun 6 1994 → Jun 8 1994 |