Thermal management in optical MEMS

Joseph J. Talghader

doi:10.1117/12.443090

Thermal management in optical MEMS

Joseph J. Talghader

Electrical and Computer Engineering

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

The methods for eliminating thermal effects in optical microelectromechanical (MEMS) devices were discussed. The methods discussed include high reflectivity optical coatings to reduce absorption, compensation layers within optical coatings that cancel out deformation and direct electrostatic control of device thermal conductivity. The results showed that the failure of the MEMS device was because of change in curvature which lead to defocus and astigmatism.

Original language	English (US)
Pages (from-to)	20-27
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4561
DOIs	https://doi.org/10.1117/12.443090
State	Published - Dec 1 2001
Event	MOEMS and Miniaturized Systems II - San Francisco, CA, United States Duration: Oct 22 2001 → Oct 24 2001

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title = "Thermal management in optical MEMS",

abstract = "The methods for eliminating thermal effects in optical microelectromechanical (MEMS) devices were discussed. The methods discussed include high reflectivity optical coatings to reduce absorption, compensation layers within optical coatings that cancel out deformation and direct electrostatic control of device thermal conductivity. The results showed that the failure of the MEMS device was because of change in curvature which lead to defocus and astigmatism.",

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N2 - The methods for eliminating thermal effects in optical microelectromechanical (MEMS) devices were discussed. The methods discussed include high reflectivity optical coatings to reduce absorption, compensation layers within optical coatings that cancel out deformation and direct electrostatic control of device thermal conductivity. The results showed that the failure of the MEMS device was because of change in curvature which lead to defocus and astigmatism.

AB - The methods for eliminating thermal effects in optical microelectromechanical (MEMS) devices were discussed. The methods discussed include high reflectivity optical coatings to reduce absorption, compensation layers within optical coatings that cancel out deformation and direct electrostatic control of device thermal conductivity. The results showed that the failure of the MEMS device was because of change in curvature which lead to defocus and astigmatism.

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AN - SCOPUS:0035763898

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JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - MOEMS and Miniaturized Systems II

Y2 - 22 October 2001 through 24 October 2001

ER -

Thermal management in optical MEMS

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