Thermal management in optical MEMS

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


The methods for eliminating thermal effects in optical microelectromechanical (MEMS) devices were discussed. The methods discussed include high reflectivity optical coatings to reduce absorption, compensation layers within optical coatings that cancel out deformation and direct electrostatic control of device thermal conductivity. The results showed that the failure of the MEMS device was because of change in curvature which lead to defocus and astigmatism.

Original languageEnglish (US)
Pages (from-to)20-27
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - Dec 1 2001
EventMOEMS and Miniaturized Systems II - San Francisco, CA, United States
Duration: Oct 22 2001Oct 24 2001


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