TY - JOUR
T1 - Theoretical examination of MEMS microactuator responses with an emphasis on materials and fabrication
AU - Glumac, D. E.
AU - Cooney, T. G.
AU - Francis, L. F.
AU - Robbins, W. P.
PY - 1995
Y1 - 1995
N2 - A free standing cantilever beam consisting of a support structural material (polysilicon/silicon nitride), a piezoelectric PZT ceramic layer, and metal electrode layers has been analyzed. Beam theory and finite element analysis were used to model the electric field induced deflections of this structure, and provided information as to how material choices influenced actuator function. Both support material and PZT thicknesses varied from 0-1.0 μm, and bulk piezoelectric coefficients and elastic moduli were assumed. The beam theory uses known (or assumed) material properties to predict actuator responses. Conversely, if device responses can be measured, material properties may be inferred from the theory. For a PZT thickness of 0.3 μm, a core layer thickness of 0.13 μm was found to maximize displacement. Also, the force output was found to be more dependent on the core thickness than that of the PZT. This information can then be used to predict the response of a more complex microactuator.
AB - A free standing cantilever beam consisting of a support structural material (polysilicon/silicon nitride), a piezoelectric PZT ceramic layer, and metal electrode layers has been analyzed. Beam theory and finite element analysis were used to model the electric field induced deflections of this structure, and provided information as to how material choices influenced actuator function. Both support material and PZT thicknesses varied from 0-1.0 μm, and bulk piezoelectric coefficients and elastic moduli were assumed. The beam theory uses known (or assumed) material properties to predict actuator responses. Conversely, if device responses can be measured, material properties may be inferred from the theory. For a PZT thickness of 0.3 μm, a core layer thickness of 0.13 μm was found to maximize displacement. Also, the force output was found to be more dependent on the core thickness than that of the PZT. This information can then be used to predict the response of a more complex microactuator.
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M3 - Conference article
AN - SCOPUS:0029212282
SN - 0272-9172
VL - 360
SP - 407
EP - 412
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
T2 - Proceedings of the 1994 MRS Fall Meeting
Y2 - 28 November 1994 through 30 November 1994
ER -