Theoretical and experimental study of an axial flow cyclone for fine particle removal in vacuum conditions

Chuen Jinn Tsai, Daren Ren Chen, Hungmin Chein, Sheng Chieh Chen, Jian Lun Roth, Yu Du Hsu, Weiling Li, Pratim Biswas

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41 Scopus citations


An axial flow cyclone to remove fine particles at low pressure conditions (6-23 torr) was designed and tested. The inner diameter of the cyclone is 3.0 cm and tested flow rates are 0.455 and 1.0 slpm. A theoretical evaluation was first carried out to calculate the particle collection efficiency and cutoff diameter for the axial flow cyclone. Experiments were then conducted to test the theory at different flow rates, pressures and cyclone designs. It was demonstrated that at sufficiently low pressure of 6 torr (flow rate=0.455 slpm), the axial flow cyclone is able to remove particles below 100 nm efficiently, and the flow Reynolds number was found to have a great effect on the particle collection efficiency.

Original languageEnglish (US)
Pages (from-to)1105-1118
Number of pages14
JournalJournal of Aerosol Science
Issue number9
StatePublished - Sep 2004
Externally publishedYes

Bibliographical note

Funding Information:
Authors would like to thank for the financial support of this project by the Industrial Technology Research Institute (ITRI) in Taiwan in 2003, and Taiwan National Science Council (NSC 92-2211-E-009-016).


  • Air pollution control
  • Axial Flow cyclone
  • Particle control


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