The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

Charles N. Arutt; Michael L. Alles; Wenjun Liao; Huiqi Gong; Jim L. Davidson; Ronald D. Schrimpf; Robert A. Reed; Robert A. Weller; Kirill Bolotin; Ryan Nicholl; Thang Toan Pham; Alex Zettl; Du Qingyang; Juejun Hu; Mo Li; Bruce W. Alphenaar; Ji Tzuoh Lin; Pranoy Deb Shurva; Shamus McNamara; Kevin M. Walsh; Philip X L Feng; Louis Hutin; Thomas Ernst; Brian D. Homeijer; Ronald G. Polcawich; Robert M. Proie; Jacob L. Jones; Evan R. Glaser; Cory D. Cress; Nazanin Bassiri-Gharb

doi:10.1088/1361-6641/32/1/013005

The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

Charles N. Arutt, Michael L. Alles, Wenjun Liao, Huiqi Gong, Jim L. Davidson, Ronald D. Schrimpf, Robert A. Reed, Robert A. Weller, Kirill Bolotin, Ryan Nicholl, Thang Toan Pham, Alex Zettl, Du Qingyang, Juejun Hu, Mo Li, Bruce W. Alphenaar, Ji Tzuoh Lin, Pranoy Deb Shurva, Shamus McNamara, Kevin M. WalshPhilip X L Feng, Louis Hutin, Thomas Ernst, Brian D. Homeijer, Ronald G. Polcawich, Robert M. Proie, Jacob L. Jones, Evan R. Glaser, Cory D. Cress, Nazanin Bassiri-Gharb

Electrical and Computer Engineering

Research output: Contribution to journal › Review article › peer-review

33 Scopus citations

Abstract

The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS₂). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.

Original language	English (US)
Article number	013005
Journal	Semiconductor Science and Technology
Volume	32
Issue number	1
DOIs	https://doi.org/10.1088/1361-6641/32/1/013005
State	Published - Jan 2017

Bibliographical note

Publisher Copyright:
© 2016 IOP Publishing Ltd.

Keywords

2D materials
MEMS
NEMS
micromachined cantilevers
radiation effects
silicon carbide (SiC)

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10.1088/1361-6641/32/1/013005

https://www.lib.umn.edu/clrc

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Arutt, C. N., Alles, M. L., Liao, W., Gong, H., Davidson, J. L., Schrimpf, R. D., Reed, R. A., Weller, R. A., Bolotin, K., Nicholl, R., Pham, T. T., Zettl, A., Qingyang, D., Hu, J., Li, M., Alphenaar, B. W., Lin, J. T., Shurva, P. D., McNamara, S., ... Bassiri-Gharb, N. (2017). The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs). Semiconductor Science and Technology, 32(1), Article 013005. https://doi.org/10.1088/1361-6641/32/1/013005

Arutt, CN, Alles, ML, Liao, W, Gong, H, Davidson, JL, Schrimpf, RD, Reed, RA, Weller, RA, Bolotin, K, Nicholl, R, Pham, TT, Zettl, A, Qingyang, D, Hu, J, Li, M, Alphenaar, BW, Lin, JT, Shurva, PD, McNamara, S, Walsh, KM, Feng, PXL, Hutin, L, Ernst, T, Homeijer, BD, Polcawich, RG, Proie, RM, Jones, JL, Glaser, ER, Cress, CD & Bassiri-Gharb, N 2017, 'The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)', Semiconductor Science and Technology, vol. 32, no. 1, 013005. https://doi.org/10.1088/1361-6641/32/1/013005

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abstract = "The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS2). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.",

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AU - McNamara, Shamus

AU - Walsh, Kevin M.

AU - Feng, Philip X L

AU - Hutin, Louis

AU - Ernst, Thomas

AU - Homeijer, Brian D.

AU - Polcawich, Ronald G.

AU - Proie, Robert M.

AU - Jones, Jacob L.

AU - Glaser, Evan R.

AU - Cress, Cory D.

AU - Bassiri-Gharb, Nazanin

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N2 - The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS2). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.

AB - The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS2). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.

KW - 2D materials

KW - MEMS

KW - NEMS

KW - micromachined cantilevers

KW - radiation effects

KW - silicon carbide (SiC)

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The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

Abstract

Bibliographical note

Keywords

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