The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

Charles N. Arutt; Michael L. Alles; Wenjun Liao; Huiqi Gong; Jim L. Davidson; Ronald D. Schrimpf; Robert A. Reed; Robert A. Weller; Kirill Bolotin; Ryan Nicholl; Thang Toan Pham; Alex Zettl; Du Qingyang; Juejun Hu; Mo Li; Bruce W. Alphenaar; Ji Tzuoh Lin; Pranoy Deb Shurva; Shamus McNamara; Kevin M. Walsh; Philip X L Feng; Louis Hutin; Thomas Ernst; Brian D. Homeijer; Ronald G. Polcawich; Robert M. Proie; Jacob L. Jones; Evan R. Glaser; Cory D. Cress; Nazanin Bassiri-Gharb

doi:10.1088/1361-6641/32/1/013005

The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

Charles N. Arutt, Michael L. Alles, Wenjun Liao, Huiqi Gong, Jim L. Davidson, Ronald D. Schrimpf, Robert A. Reed, Robert A. Weller, Kirill Bolotin, Ryan Nicholl, Thang Toan Pham, Alex Zettl, Du Qingyang, Juejun Hu, Mo Li, Bruce W. Alphenaar, Ji Tzuoh Lin, Pranoy Deb Shurva, Shamus McNamara, Kevin M. WalshPhilip X L Feng, Louis Hutin, Thomas Ernst, Brian D. Homeijer, Ronald G. Polcawich, Robert M. Proie, Jacob L. Jones, Evan R. Glaser, Cory D. Cress, Nazanin Bassiri-Gharb

Electrical and Computer Engineering

Research output: Contribution to journal › Review article › peer-review

24 Scopus citations

Abstract

The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS₂). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.

Original language	English (US)
Article number	013005
Journal	Semiconductor Science and Technology
Volume	32
Issue number	1
DOIs	https://doi.org/10.1088/1361-6641/32/1/013005
State	Published - Jan 2017

Bibliographical note

Funding Information:
This work is supported by the Defense Threat Reduction Agency Basic Research Program, Grants number: HDTRA1- 15-1-0027, HDTRA1-15-1-0035, HDTRA1-15-1-0036, HDTRA1-15-1-0039, and HDTRA1-15-1-0060.

Publisher Copyright:
© 2016 IOP Publishing Ltd.

Keywords

2D materials
MEMS
NEMS
micromachined cantilevers
radiation effects
silicon carbide (SiC)

Publisher link

10.1088/1361-6641/32/1/013005

https://www.lib.umn.edu/clrc

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Arutt, C. N., Alles, M. L., Liao, W., Gong, H., Davidson, J. L., Schrimpf, R. D., Reed, R. A., Weller, R. A., Bolotin, K., Nicholl, R., Pham, T. T., Zettl, A., Qingyang, D., Hu, J., Li, M., Alphenaar, B. W., Lin, J. T., Shurva, P. D., McNamara, S., ... Bassiri-Gharb, N. (2017). The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs). Semiconductor Science and Technology, 32(1), [013005]. https://doi.org/10.1088/1361-6641/32/1/013005

The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs). / Arutt, Charles N.; Alles, Michael L.; Liao, Wenjun; Gong, Huiqi; Davidson, Jim L.; Schrimpf, Ronald D.; Reed, Robert A.; Weller, Robert A.; Bolotin, Kirill; Nicholl, Ryan; Pham, Thang Toan; Zettl, Alex; Qingyang, Du; Hu, Juejun; Li, Mo; Alphenaar, Bruce W.; Lin, Ji Tzuoh; Shurva, Pranoy Deb; McNamara, Shamus; Walsh, Kevin M.; Feng, Philip X L; Hutin, Louis; Ernst, Thomas; Homeijer, Brian D.; Polcawich, Ronald G.; Proie, Robert M.; Jones, Jacob L.; Glaser, Evan R.; Cress, Cory D.; Bassiri-Gharb, Nazanin.

In: Semiconductor Science and Technology, Vol. 32, No. 1, 013005, 01.2017.

Research output: Contribution to journal › Review article › peer-review

Arutt, CN, Alles, ML, Liao, W, Gong, H, Davidson, JL, Schrimpf, RD, Reed, RA, Weller, RA, Bolotin, K, Nicholl, R, Pham, TT, Zettl, A, Qingyang, D, Hu, J, Li, M, Alphenaar, BW, Lin, JT, Shurva, PD, McNamara, S, Walsh, KM, Feng, PXL, Hutin, L, Ernst, T, Homeijer, BD, Polcawich, RG, Proie, RM, Jones, JL, Glaser, ER, Cress, CD & Bassiri-Gharb, N 2017, 'The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)', Semiconductor Science and Technology, vol. 32, no. 1, 013005. https://doi.org/10.1088/1361-6641/32/1/013005

Arutt, Charles N. ; Alles, Michael L. ; Liao, Wenjun ; Gong, Huiqi ; Davidson, Jim L. ; Schrimpf, Ronald D. ; Reed, Robert A. ; Weller, Robert A. ; Bolotin, Kirill ; Nicholl, Ryan ; Pham, Thang Toan ; Zettl, Alex ; Qingyang, Du ; Hu, Juejun ; Li, Mo ; Alphenaar, Bruce W. ; Lin, Ji Tzuoh ; Shurva, Pranoy Deb ; McNamara, Shamus ; Walsh, Kevin M. ; Feng, Philip X L ; Hutin, Louis ; Ernst, Thomas ; Homeijer, Brian D. ; Polcawich, Ronald G. ; Proie, Robert M. ; Jones, Jacob L. ; Glaser, Evan R. ; Cress, Cory D. ; Bassiri-Gharb, Nazanin. / The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs). In: Semiconductor Science and Technology. 2017 ; Vol. 32, No. 1.

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abstract = "The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS2). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.",

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AU - Gong, Huiqi

AU - Davidson, Jim L.

AU - Schrimpf, Ronald D.

AU - Reed, Robert A.

AU - Weller, Robert A.

AU - Bolotin, Kirill

AU - Nicholl, Ryan

AU - Pham, Thang Toan

AU - Zettl, Alex

AU - Qingyang, Du

AU - Hu, Juejun

AU - Li, Mo

AU - Alphenaar, Bruce W.

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AU - Feng, Philip X L

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AU - Jones, Jacob L.

AU - Glaser, Evan R.

AU - Cress, Cory D.

AU - Bassiri-Gharb, Nazanin

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N2 - The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS2). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.

AB - The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS2). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.

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The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

Abstract

Bibliographical note

Keywords

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