The study of bonding composition of CN_x film by thermal degradation method

Keyphrases

• Degradation Methods 100%
• Thermal Degradation 100%
• CNx Film 100%
• Graphitic Carbon 100%
• Bonding Composition 100%
• Carbon-nitrogen 66%
• Nitrogen Molecule 66%
• Dissociation 33%
• Activation Energy 33%
• N-ratio 33%
• Nitrogen Atom 33%
• Relative Amount 33%
• Amorphous Carbon Nitride 33%
• Apparent Activation Energy 33%
• Charged Defects 33%
• Nitrogen Cluster 33%
• Magnetron Sputtering 33%
• Carbon Atom 33%
• Plasma Energy 33%
• Nitrogen Amount 33%
• Ta-CNx 33%
• Dynamic Thermal Behavior 33%

Material Science

• Film 100%
• Thermal Degradation 100%
• Amorphous Carbon 33%
• Carbon Nitride 33%
• Activation Energy 33%
• Thin Films 33%

Physics

• Thermal Degradation 100%
• Nitrogen 100%
• Activation Energy 20%
• Carbon Nitride 20%
• Thin Films 20%
• Nitrogen Atom 20%
• Magnetron 20%