The role of internal radiation and melt convection in Czochralski oxide growth: deep interfaces, interface inversion, and spiraling

Qiang Xiao, Jeffrey J. Derby

Research output: Contribution to journalArticlepeer-review

88 Scopus citations

Abstract

Calculations are performed with an integrated process model for Czochralski oxide growth in which internal radiative heat transfer through the crystal is approximated. For the first time, melt/crystal interfaces are predicted which are deeply convex toward the melt and similar in shape to those observed experimentally. These results provide additional support for the importance of internal radiation in these systems. The inversion of these deep interfaces is also examined as a function of forced and natural convection in the melt. Finally, a new mechanism for the onset of crystal spiraling is postulated from observations of superheated crystal regions in some calculations.

Original languageEnglish (US)
Pages (from-to)188-194
Number of pages7
JournalJournal of Crystal Growth
Volume128
Issue number1-4
DOIs
StatePublished - Mar 1 1993

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