The influence of thermophoresis effects during deposition of hydrogenated amorphous silicon thin films with nanocrystalline silicon inclusions

C. Blackwell, C. Anderson, J. Deneen, C. B. Carter, U. Kortshagen, J. Kakalios

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Silicon cluster formation is known to occur within silane plasmas when a capacitively-coupled deposition reactor is operated at high gas chamber pressures. These clusters are sensitive to the thermophoretic forces that will, depending on the sign of the thermal gradient, direct them toward or away from the silicon film's growing surface. We have developed a dual-chamber deposition system that produces nanocrystalline silicon particles (roughly 3-5 nm in diameter) in a flow-through reactor, and injects these particles into a separate capacitively-coupled plasma chamber where the amorphous film is produced. The structural, optical and electronic properties of these mixed-phase materials are investigated as a function of the controllable thermal gradient applied across the silane plasma during deposition.

Original languageEnglish (US)
Title of host publicationAmorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006
Pages181-186
Number of pages6
StatePublished - Jun 12 2007
Event2006 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 17 2006Apr 21 2006

Publication series

NameMaterials Research Society Symposium Proceedings
Volume910
ISSN (Print)0272-9172

Other

Other2006 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/17/064/21/06

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    Blackwell, C., Anderson, C., Deneen, J., Carter, C. B., Kortshagen, U., & Kakalios, J. (2007). The influence of thermophoresis effects during deposition of hydrogenated amorphous silicon thin films with nanocrystalline silicon inclusions. In Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006 (pp. 181-186). (Materials Research Society Symposium Proceedings; Vol. 910).