Keyphrases
Atomic Layer Deposition
100%
Decarbonylation
100%
Ru Films
100%
In Situ
20%
Device Application
20%
Growth Mechanism
20%
Non-self
20%
Strong Dependence
20%
Carbonyl
20%
Film Thickness
20%
Chemical Vapor Deposition Processes
20%
Self-limiting
20%
Ruthenium
20%
Kinetic Model
20%
Reaction Scheme
20%
Oxidation State
20%
Effective Saturation
20%
Drive Mechanism
20%
Mild Reaction Conditions
20%
Quartz Crystal Microbalance with Dissipation (QCM-D)
20%
Author Studies
20%
Tricarbonyl
20%
2,3-dimethylbutadiene
20%
Low Temperature Reaction
20%
Film Characterization
20%
Thermal Atomic Layer Deposition
20%
Noble Metal Films
20%
Quadrupole Mass Spectrometry
20%
Zero-valent
20%
Material Science
Film
100%
Nucleation
100%
Chemical Vapor Deposition
33%
Ruthenium
33%
Film Thickness
33%
Metal Film
33%
Vapor Phase Deposition
33%
Quadrupole Mass Spectrometry
33%
Chemical Engineering
Atomic Layer Deposition
100%
Film
83%
Precious Metal
16%
Mass Spectrometry
16%
Vapor Deposition
16%
Chemical Vapor Deposition
16%
Engineering
Atomic Layer Deposition
100%
Chemical Vapor Deposition
16%
Vapor Deposition
16%
Low-Temperature
16%
Broader Class
16%
Growth Mechanism
16%
Quartz Crystal Microbalance
16%
Reaction Scheme
16%
Deposition Process
16%