The energy distribution function of ions impinging on nanoparticles in a collisional low-pressure plasma

Federico Galli, Meenakshi Mamunuru, Uwe R. Kortshagen

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

A self-consistent particle-in-cell/Monte Carlo collision (PIC/MCC) simulation is used to calculate the ion energy distribution (IED) function of ions impinging on the surface of nanoparticles in low-pressure argon plasmas. The computation includes the effects of resonant charge-exchange and elastic collisions between ions and neutrals through a Monte Carlo null-collision method and considers both Maxwellian and non-Maxwellian electron energy distributions. Results show a strong dependence of the IED on pressure. Intermediate pressures yield a remarkable reduction in the average ion energy and an enhancement in the ion flux to the surface of the nanoparticles.

Original languageEnglish (US)
Article number035002
JournalPlasma Sources Science and Technology
Volume21
Issue number3
DOIs
StatePublished - Jun 2012

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