The electrical charge of micron-sized particles in a capacitively coupled RF discharge is determined using a relatively simple theoretical model. The specific properties of the RF sheath are taken into account. The results are compared to charge measurements of particles which have been injected into the active discharge.
|Original language||English (US)|
|Number of pages||7|
|Journal||Physics Letters, Section A: General, Atomic and Solid State Physics|
|State||Published - Jul 8 1996|
- Dusty plasmas
- RF discharges