The "effective" penetration depth of backscattered electrons associated with electron channeling patterns (ECPs)

Mieczyslaw Kaczorowski, William W Gerberich

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

A simple method was used to determine the "effective" penetration depth of backscattered electrons. The technique was to examine electron channeling patterns (ECPs) of Si〈100〉 single crystals, covered by different thicknesses of polycrystalline aluminum layers. The "effective" depth was established as a function of electron energy. It was determined that this depth differs from that anticipated by theory but is consistent with other experimental data. Some reasons for this discrepancy are discussed.

Original languageEnglish (US)
Pages (from-to)244-248
Number of pages5
JournalMaterials Letters
Volume4
Issue number5-7
DOIs
StatePublished - Jul 1986

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