The development of a MEMS gyroscope for absolute angle measurement

Damrongrit Piyabongkarn, Rajesh Rajamani

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations

Abstract

MEMS gyroscopes are typically designed to measure angular rate of rotation. A measurement of the angle itself is useful in many applications but cannot be obtained by integrating the angular rate due to the presence of bias errors which cause a drift. This paper presents an innovative design for a vibrating gyroscope that can directly measure both angle and angular rate. The design is based on the principle of measuring the angle of free vibration of a suspended mass with respect to the casing of the gyroscope. Several critical challenges have to be handled before the theoretical sensing concept can be converted into a reliable practical sensor. These include compensating for the presence of dissipative forces, mismatched springs, cross-axis stiffness and transmission of rotary torque. These challenges are addressed by the development of a composite nonlinear feedback control system that compensates for each of the above effects and ensures that the mass continues to behave as a freely vibrating structure. Theoretical analysis and simulation results presented in the paper show that the gyroscope can accurately measure both angle and angular rate for low bandwidth applications.

Original languageEnglish (US)
Pages (from-to)1960-1965
Number of pages6
JournalProceedings of the American Control Conference
Volume3
StatePublished - Jan 1 2002
Event2002 American Control Conference - Anchorage, AK, United States
Duration: May 8 2002May 10 2002

Keywords

  • Angle measurement
  • Angular rate
  • Gyroscope
  • MEMS

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