THE APPLICATION OF MICRO FIELD THEORY TO MEMS ACTUATORS

T. H. Cui; Z. Y. Zhou

doi:10.1115/IMECE1996-1383

THE APPLICATION OF MICRO FIELD THEORY TO MEMS ACTUATORS

T. H. Cui
, Z. Y. Zhou

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents a new basic concept which is the theory of micro field effect to analyze the actuation mechanism of MEMS(Micro Electro Mechanical Systems) actuators. First, the basic concept and fundamental principle of micro field have been put forward. Then, the micro field effect has been used to analyze the intrinsic quality of two kinds of microactuators, which include an electrohydrodynamic (EHD) micropump and a piezoelectric micromotor as typical examples. Finally, a new kind of piezoelectric micromotor model has been fabricated to carry out experiments. The basic principle ofmicro field effect has been tested and verified.

Original language	English (US)
Title of host publication	Microelectromechanical Systems (MEMS)
Publisher	American Society of Mechanical Engineers (ASME)
Pages	417-420
Number of pages	4
ISBN (Electronic)	9780791815410
DOIs	https://doi.org/10.1115/IMECE1996-1383
State	Published - 1996
Externally published	Yes
Event	ASME 1996 International Mechanical Engineering Congress and Exposition, IMECE 1996 - Atlanta, United States Duration: Nov 17 1996 → Nov 22 1996

Publication series

Name	ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume	1996-U

Conference

Conference	ASME 1996 International Mechanical Engineering Congress and Exposition, IMECE 1996
Country/Territory	United States
City	Atlanta
Period	11/17/96 → 11/22/96

Bibliographical note

Publisher Copyright:
© 1996 American Society of Mechanical Engineers (ASME). All rights reserved.

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10.1115/IMECE1996-1383

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THE APPLICATION OF MICRO FIELD THEORY TO MEMS ACTUATORS. / Cui, T. H.; Zhou, Z. Y.
Microelectromechanical Systems (MEMS). American Society of Mechanical Engineers (ASME), 1996. p. 417-420 (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 1996-U).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Cui, TH & Zhou, ZY 1996, THE APPLICATION OF MICRO FIELD THEORY TO MEMS ACTUATORS. in Microelectromechanical Systems (MEMS). ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), vol. 1996-U, American Society of Mechanical Engineers (ASME), pp. 417-420, ASME 1996 International Mechanical Engineering Congress and Exposition, IMECE 1996, Atlanta, United States, 11/17/96. https://doi.org/10.1115/IMECE1996-1383

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year = "1996",

doi = "10.1115/IMECE1996-1383",

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AB - This paper presents a new basic concept which is the theory of micro field effect to analyze the actuation mechanism of MEMS(Micro Electro Mechanical Systems) actuators. First, the basic concept and fundamental principle of micro field have been put forward. Then, the micro field effect has been used to analyze the intrinsic quality of two kinds of microactuators, which include an electrohydrodynamic (EHD) micropump and a piezoelectric micromotor as typical examples. Finally, a new kind of piezoelectric micromotor model has been fabricated to carry out experiments. The basic principle ofmicro field effect has been tested and verified.

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ER -

THE APPLICATION OF MICRO FIELD THEORY TO MEMS ACTUATORS

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