Abstract
Tensile strained Ge/In0.16Ga0.84As heterostructure was grown in situ by molecular beam epitaxy using two separated growth chambers for Ge and III-V materials. Controlled growth conditions led to the presence of 0.75% in-plane tensile strain within Ge layer. High-resolution transmission electron microscopy confirmed pseudomorphic Ge with high crystalline quality and a sharp Ge/In0.16Ga0.84As heterointerface. Atomic force microscopy revealed a uniform two-dimensional cross-hatch surface morphology with a root-mean-square roughness of 1.26 nm. X-ray photoelectron spectroscopy demonstrated reduced tunneling-barrier-height compared with Ge/GaAs heterostructure. The superior structural properties suggest tensile strained Ge/In0.16Ga0.84As heterostructure would be a promising candidate for high-performance and energy-efficient tunnel field-effect transistor applications.
Original language | English (US) |
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Pages (from-to) | 4947-4953 |
Number of pages | 7 |
Journal | ACS Applied Materials and Interfaces |
Volume | 6 |
Issue number | 7 |
DOIs | |
State | Published - Apr 9 2014 |
Externally published | Yes |
Keywords
- high crystalline quality
- molecular beam epitaxy
- sharp heterointerface
- tensile strain
- tunnel field-effect transistor