Temperature-Dependent Absorption Measurements in High- and Low-Loss Regions of Silicon Nitride Membranes

Tanuj Kumar; Demeng Feng; Shenwei Yin; Merlin Mah; Phyo Lin; Margaret Fortman; Kevin Schnittker; Chengyu Fang; Joseph Andrews; Ronald J. Warzoha; Victor W. Brar; Joseph J. Talghader; Mikhail A. Kats

doi:10.1364/CLEO_SI.2025.SS141_1

Temperature-Dependent Absorption Measurements in High- and Low-Loss Regions of Silicon Nitride Membranes

Tanuj Kumar
, Demeng Feng
, Shenwei Yin
, Merlin Mah
, Phyo Lin
, Margaret Fortman
, Kevin Schnittker
, Chengyu Fang
, Joseph Andrews
, Ronald J. Warzoha
, Victor W. Brar
, Joseph J. Talghader
, Mikhail A. Kats

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present room- and high-temperature absorption measurements in stoichiometric silicon nitride (Si3N4) membranes using spectroscopic ellipsometry at high-loss wavelengths, and self-referencing photothermal common-path interferometry (PCI) at low-loss infrared wavelengths.

Original language	English (US)
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations - Proceedings CLEO 2025
Publisher	Optical Society of America
ISBN (Electronic)	9781957171500
DOIs	https://doi.org/10.1364/CLEO_SI.2025.SS141_1
State	Published - 2025
Event	2025 CLEO: Science and Innovations, CLEO-SI 2025 - Long Beach, United States Duration: May 4 2025 → May 9 2025

Publication series

Name	CLEO: Science and Innovations - Proceedings CLEO 2025

Conference

Conference	2025 CLEO: Science and Innovations, CLEO-SI 2025
Country/Territory	United States
City	Long Beach
Period	5/4/25 → 5/9/25

Bibliographical note

Publisher Copyright:
© Optica Publishing Group 2025.

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10.1364/CLEO_SI.2025.SS141_1

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Kumar, T., Feng, D., Yin, S., Mah, M., Lin, P., Fortman, M., Schnittker, K., Fang, C., Andrews, J., Warzoha, R. J., Brar, V. W., Talghader, J. J., & Kats, M. A. (2025). Temperature-Dependent Absorption Measurements in High- and Low-Loss Regions of Silicon Nitride Membranes. In CLEO: Science and Innovations - Proceedings CLEO 2025 (CLEO: Science and Innovations - Proceedings CLEO 2025). Optical Society of America. https://doi.org/10.1364/CLEO_SI.2025.SS141_1

Temperature-Dependent Absorption Measurements in High- and Low-Loss Regions of Silicon Nitride Membranes. / Kumar, Tanuj; Feng, Demeng; Yin, Shenwei et al.
CLEO: Science and Innovations - Proceedings CLEO 2025. Optical Society of America, 2025. (CLEO: Science and Innovations - Proceedings CLEO 2025).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kumar, T, Feng, D, Yin, S, Mah, M, Lin, P, Fortman, M, Schnittker, K, Fang, C, Andrews, J, Warzoha, RJ, Brar, VW, Talghader, JJ & Kats, MA 2025, Temperature-Dependent Absorption Measurements in High- and Low-Loss Regions of Silicon Nitride Membranes. in CLEO: Science and Innovations - Proceedings CLEO 2025. CLEO: Science and Innovations - Proceedings CLEO 2025, Optical Society of America, 2025 CLEO: Science and Innovations, CLEO-SI 2025, Long Beach, United States, 5/4/25. https://doi.org/10.1364/CLEO_SI.2025.SS141_1

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title = "Temperature-Dependent Absorption Measurements in High- and Low-Loss Regions of Silicon Nitride Membranes",

abstract = "We present room- and high-temperature absorption measurements in stoichiometric silicon nitride (Si3N4) membranes using spectroscopic ellipsometry at high-loss wavelengths, and self-referencing photothermal common-path interferometry (PCI) at low-loss infrared wavelengths.",

author = "Tanuj Kumar and Demeng Feng and Shenwei Yin and Merlin Mah and Phyo Lin and Margaret Fortman and Kevin Schnittker and Chengyu Fang and Joseph Andrews and Warzoha, \{Ronald J.\} and Brar, \{Victor W.\} and Talghader, \{Joseph J.\} and Kats, \{Mikhail A.\}",

note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2025.; 2025 CLEO: Science and Innovations, CLEO-SI 2025 ; Conference date: 04-05-2025 Through 09-05-2025",

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doi = "10.1364/CLEO\_SI.2025.SS141\_1",

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AU - Kumar, Tanuj

AU - Feng, Demeng

AU - Yin, Shenwei

AU - Mah, Merlin

AU - Lin, Phyo

AU - Fortman, Margaret

AU - Schnittker, Kevin

AU - Fang, Chengyu

AU - Andrews, Joseph

AU - Warzoha, Ronald J.

AU - Brar, Victor W.

AU - Talghader, Joseph J.

AU - Kats, Mikhail A.

PY - 2025

Y1 - 2025

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AB - We present room- and high-temperature absorption measurements in stoichiometric silicon nitride (Si3N4) membranes using spectroscopic ellipsometry at high-loss wavelengths, and self-referencing photothermal common-path interferometry (PCI) at low-loss infrared wavelengths.

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UR - https://www.scopus.com/pages/publications/105033617615#tab=citedBy

U2 - 10.1364/CLEO_SI.2025.SS141_1

DO - 10.1364/CLEO_SI.2025.SS141_1

M3 - Conference contribution

AN - SCOPUS:105033617615

T3 - CLEO: Science and Innovations - Proceedings CLEO 2025

BT - CLEO

PB - Optical Society of America

T2 - 2025 CLEO: Science and Innovations, CLEO-SI 2025

Y2 - 4 May 2025 through 9 May 2025

ER -

Temperature-Dependent Absorption Measurements in High- and Low-Loss Regions of Silicon Nitride Membranes

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