Keyphrases
Oxide Thin Films
100%
Growth Chamber
50%
Deposition Chamber
50%
Ozone Production
50%
Reactive Oxygen Species
50%
Processing Stages
50%
Production Process
50%
Growth Kinetics
50%
Vapor Pressure
50%
Post-deposition Annealing
50%
Oxidizing Gas
50%
Chamber Pressure
50%
In Situ Growth
50%
Thin Film Growth
50%
Zero Resistance
50%
Oxygen Gas
50%
Ozone Gas
50%
Oxygen-ozone
50%
Safety Aspects
50%
Engineering
Thin Films
100%
Torr
33%
Growth Kinetics
33%
Processing Step
33%
Chamber Pressure
33%
Safety Aspect
33%
Oxygen Gas
33%
Thin Film Growth
33%
Material Science
Oxide Compound
100%
Thin Films
100%
Film
33%
Thin Film Growth
33%
Earth and Planetary Sciences
Thin Films
100%
Pressure Chamber
25%
Phytotrons
25%
Vapor Pressure
25%
Immunology and Microbiology