Abstract
The Ta doping effect on the microstructure and magnetic properties of Co60C40 thin films was studied. The (Co60C 40)xTa1-x films were co-sputtered onto C-buffered glass using DC magnetron sputtering. Studies showed that the (Co 60C40)97Ta3 films could get better magnetic properties at lower annealing temperature than those without Ta doping, making them more suitable for fabricating patterned nanostructures via the phase transition method.
| Original language | English (US) |
|---|---|
| Pages (from-to) | FQ10 |
| Journal | Digests of the Intermag Conference |
| State | Published - 2003 |
| Event | Intermag 2003: International Magnetics Conference - Boston, MA, United States Duration: Mar 28 2003 → Apr 3 2003 |