Single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma were synthesized. The transmission electron microscopy (TEM) images indicated that the nanoparticles were crystalline diamond cubic Si of a highly oriented character. It was found that the nanoparticles were cubic in shape, with the surfaces having non-uniform morphologies.
|Original language||English (US)|
|Number of pages||6|
|Journal||Journal of Applied Physics|
|State||Published - Aug 1 2003|