Abstract
The successful synthesis, characterization, and directed self-assembly of a silicon-containing block copolymer, poly(styrene-block-trimethylsilylisoprene) (P(S-b-TMSI)), which has much higher oxygen etch contrast than the de facto standard, poly(styrene-block-methyl methacrylate) is reported. A Sakurai, Grignard-type coupling reaction provided the key monomer in good yield. Living anionic polymerization was employed to prepare the block copolymer, which has very low polydispersity. P(S-b-TMSI) was successfully ordered and oriented by directed self-assembly.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 290-297 |
| Number of pages | 8 |
| Journal | Journal of Polymer Science, Part A: Polymer Chemistry |
| Volume | 51 |
| Issue number | 2 |
| DOIs | |
| State | Published - Jan 15 2013 |
Keywords
- anionic polymerization
- diblock copolymers
- directed self-assembly
- lithography
- trimethylsilylisoprene
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