@inproceedings{c80f34c0d6b941948a0b318c22d805d7,
title = "Synthesis and deposition of nanoparticles using a hypersonically expanded plasma",
abstract = "Si-Ti-N nanostructured coatings were synthesized by inertial impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). Transmission electron microscopy on samples prepared by focused ion beam (FIB) milling show TiN nanocrystallites in an amorphous matrix. X-ray photoelectron spectroscopy results indicate the presence of amorphous Si 3N4 in similar films. In-situ particle size distribution measurements show that particle size distributions peak around 14 nm under typical operating conditions.",
keywords = "Aerodynamic lenses, Nanoparticle impaction, Nanostructured coatings",
author = "Jami Hafiz and Xiaoliang Wang and Rajesh Mukherjee and McMurry, {Peter H} and Heberlein, {Joachim V.R.} and Girshick, {Steven L}",
year = "2005",
month = oct,
day = "31",
doi = "10.1063/1.2134678",
language = "English (US)",
isbn = "0735402876",
series = "AIP Conference Proceedings",
pages = "514--517",
booktitle = "NEW VISTAS IN DUSTY PLASMAS",
note = "4th International Conference on the Physics of Dusty Plasmas ; Conference date: 13-06-2005 Through 17-06-2005",
}