Suspended carbon nanotube thin film structures with high degree of alignment for NEMS switch applications

Dongjin Lee; Zhijiang Ye; Stephen A. Campbell; Tianhong Cui

doi:10.1109/TRANSDUCERS.2011.5969783

Suspended carbon nanotube thin film structures with high degree of alignment for NEMS switch applications

Dongjin Lee
, Zhijiang Ye
, Stephen A. Campbell
, Tianhong Cui

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

We describe microfluidic channel assisted carbon nanotube (CNT) alignment followed by microfabrication and characterization of a suspended CNT thin film. The alignment of CNT is enhanced by heating the CNT dispersion, which is characterized with Raman spectroscopy yielding a high G- to D-band intensity ratio of 22 along the microfluidic flow direction. The sidewall of CNT film pattern, left in a lift-off process, is eliminated by oxygen plasma etching. The resistivity of aligned CNT film is found as 1.45 × 10³ ωcm. The aligned CNT film is released by etching a sacrificial layer of amorphous silicon and characterized mechanically demonstrating a nominal high Young's modulus of 635 GPa and a yield strength of 2.4 GPa through a fixed-end beam deflection test. The lithography compatible fabrication process and the highly conductive film with an excellent mechanical property enable the aligned CNT film to be a potent candidate for nanoelectromechanical device applications.

Original language	English (US)
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	625-628
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969783
State	Published - 2011
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: Jun 5 2011 → Jun 9 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	6/5/11 → 6/9/11

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Carbon nanotube
NEMS switch
alignment
microfluidics

Publisher link

10.1109/TRANSDUCERS.2011.5969783

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Lee, D., Ye, Z., Campbell, S. A., & Cui, T. (2011). Suspended carbon nanotube thin film structures with high degree of alignment for NEMS switch applications. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 625-628). Article 5969783 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969783

Suspended carbon nanotube thin film structures with high degree of alignment for NEMS switch applications. / Lee, Dongjin; Ye, Zhijiang; Campbell, Stephen A. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 625-628 5969783 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Lee, D, Ye, Z, Campbell, SA & Cui, T 2011, Suspended carbon nanotube thin film structures with high degree of alignment for NEMS switch applications. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969783, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 625-628, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 6/5/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969783

Lee D, Ye Z, Campbell SA , Cui T. Suspended carbon nanotube thin film structures with high degree of alignment for NEMS switch applications. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 625-628. 5969783. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969783

Lee, Dongjin ; Ye, Zhijiang ; Campbell, Stephen A. et al. / Suspended carbon nanotube thin film structures with high degree of alignment for NEMS switch applications. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 625-628 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

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title = "Suspended carbon nanotube thin film structures with high degree of alignment for NEMS switch applications",

abstract = "We describe microfluidic channel assisted carbon nanotube (CNT) alignment followed by microfabrication and characterization of a suspended CNT thin film. The alignment of CNT is enhanced by heating the CNT dispersion, which is characterized with Raman spectroscopy yielding a high G- to D-band intensity ratio of 22 along the microfluidic flow direction. The sidewall of CNT film pattern, left in a lift-off process, is eliminated by oxygen plasma etching. The resistivity of aligned CNT film is found as 1.45 × 103 ωcm. The aligned CNT film is released by etching a sacrificial layer of amorphous silicon and characterized mechanically demonstrating a nominal high Young's modulus of 635 GPa and a yield strength of 2.4 GPa through a fixed-end beam deflection test. The lithography compatible fabrication process and the highly conductive film with an excellent mechanical property enable the aligned CNT film to be a potent candidate for nanoelectromechanical device applications.",

keywords = "Carbon nanotube, NEMS switch, alignment, microfluidics",

author = "Dongjin Lee and Zhijiang Ye and Campbell, \{Stephen A.\} and Tianhong Cui",

note = "Copyright: Copyright 2011 Elsevier B.V., All rights reserved.; 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

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Y1 - 2011

N2 - We describe microfluidic channel assisted carbon nanotube (CNT) alignment followed by microfabrication and characterization of a suspended CNT thin film. The alignment of CNT is enhanced by heating the CNT dispersion, which is characterized with Raman spectroscopy yielding a high G- to D-band intensity ratio of 22 along the microfluidic flow direction. The sidewall of CNT film pattern, left in a lift-off process, is eliminated by oxygen plasma etching. The resistivity of aligned CNT film is found as 1.45 × 103 ωcm. The aligned CNT film is released by etching a sacrificial layer of amorphous silicon and characterized mechanically demonstrating a nominal high Young's modulus of 635 GPa and a yield strength of 2.4 GPa through a fixed-end beam deflection test. The lithography compatible fabrication process and the highly conductive film with an excellent mechanical property enable the aligned CNT film to be a potent candidate for nanoelectromechanical device applications.

AB - We describe microfluidic channel assisted carbon nanotube (CNT) alignment followed by microfabrication and characterization of a suspended CNT thin film. The alignment of CNT is enhanced by heating the CNT dispersion, which is characterized with Raman spectroscopy yielding a high G- to D-band intensity ratio of 22 along the microfluidic flow direction. The sidewall of CNT film pattern, left in a lift-off process, is eliminated by oxygen plasma etching. The resistivity of aligned CNT film is found as 1.45 × 103 ωcm. The aligned CNT film is released by etching a sacrificial layer of amorphous silicon and characterized mechanically demonstrating a nominal high Young's modulus of 635 GPa and a yield strength of 2.4 GPa through a fixed-end beam deflection test. The lithography compatible fabrication process and the highly conductive film with an excellent mechanical property enable the aligned CNT film to be a potent candidate for nanoelectromechanical device applications.

KW - Carbon nanotube

KW - NEMS switch

KW - alignment

KW - microfluidics

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Y2 - 5 June 2011 through 9 June 2011

ER -

Suspended carbon nanotube thin film structures with high degree of alignment for NEMS switch applications

Abstract

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UN SDGs

Keywords

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