Surface heterostructure nanomechanical actuators with atomic resolution

Jan D. Makowski; Joseph J. Talghader

doi:10.1063/1.2735675

Surface heterostructure nanomechanical actuators with atomic resolution

Jan D. Makowski, Joseph J. Talghader

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

A continuously tunable vertical actuator with subnanometer resolution is presented. It consists of a heterostructure cantilever which has collapsed over a 125 nm thick nanogap. Its operating principle relies on the temperature dependence of the adhesion energy between two InGaAs surface quantum wells. Deflections from -17 to 5 nm with a precision better than three atomic layers have been measured.

Original language	English (US)
Article number	183111
Journal	Applied Physics Letters
Volume	90
Issue number	18
DOIs	https://doi.org/10.1063/1.2735675
State	Published - 2007

Bibliographical note

Funding Information:
The authors would like to thank Chris Palmstrøm and Sukgeun Choi of the University of Minnesota and Jin Dong Song of the Korean Institute of Science and Technology for MBE growth. This work was sponsored by the National Science Foundation under Grant No. ECS-0631241.

Publisher link

10.1063/1.2735675

Find It

Find It at U of M Libraries

Cite this

@article{bd0bad3be71e408bba645b813ea49e05,

title = "Surface heterostructure nanomechanical actuators with atomic resolution",

abstract = "A continuously tunable vertical actuator with subnanometer resolution is presented. It consists of a heterostructure cantilever which has collapsed over a 125 nm thick nanogap. Its operating principle relies on the temperature dependence of the adhesion energy between two InGaAs surface quantum wells. Deflections from -17 to 5 nm with a precision better than three atomic layers have been measured.",

author = "Makowski, {Jan D.} and Talghader, {Joseph J.}",

note = "Funding Information: The authors would like to thank Chris Palmstr{\o}m and Sukgeun Choi of the University of Minnesota and Jin Dong Song of the Korean Institute of Science and Technology for MBE growth. This work was sponsored by the National Science Foundation under Grant No. ECS-0631241. ",

year = "2007",

doi = "10.1063/1.2735675",

language = "English (US)",

volume = "90",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "18",

}

TY - JOUR

T1 - Surface heterostructure nanomechanical actuators with atomic resolution

AU - Makowski, Jan D.

AU - Talghader, Joseph J.

N1 - Funding Information: The authors would like to thank Chris Palmstrøm and Sukgeun Choi of the University of Minnesota and Jin Dong Song of the Korean Institute of Science and Technology for MBE growth. This work was sponsored by the National Science Foundation under Grant No. ECS-0631241.

PY - 2007

Y1 - 2007

N2 - A continuously tunable vertical actuator with subnanometer resolution is presented. It consists of a heterostructure cantilever which has collapsed over a 125 nm thick nanogap. Its operating principle relies on the temperature dependence of the adhesion energy between two InGaAs surface quantum wells. Deflections from -17 to 5 nm with a precision better than three atomic layers have been measured.

AB - A continuously tunable vertical actuator with subnanometer resolution is presented. It consists of a heterostructure cantilever which has collapsed over a 125 nm thick nanogap. Its operating principle relies on the temperature dependence of the adhesion energy between two InGaAs surface quantum wells. Deflections from -17 to 5 nm with a precision better than three atomic layers have been measured.

UR - http://www.scopus.com/inward/record.url?scp=34247847928&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34247847928&partnerID=8YFLogxK

U2 - 10.1063/1.2735675

DO - 10.1063/1.2735675

M3 - Article

AN - SCOPUS:34247847928

SN - 0003-6951

VL - 90

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 18

M1 - 183111

ER -

Surface heterostructure nanomechanical actuators with atomic resolution

Abstract

Bibliographical note

Publisher link

Find It

Other files and links

Fingerprint

Cite this