Summary Abstract: Friction and wear studies of titanium nitride films formed by reactive deposition in ultrahigh vacuum

R. K. Schulze, D. R. Mantell, W. L. Gladfelter, J. F. Evans

Research output: Contribution to journalArticlepeer-review

5 Scopus citations
Original languageEnglish (US)
Pages (from-to)2163-2164
Number of pages2
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number3
StatePublished - May 1988

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