Summary Abstract: Diffraction from stepped surfaces

C. S. Lent; P. I. Cohen

doi:10.1116/1.572527

Summary Abstract: Diffraction from stepped surfaces

C. S. Lent
, P. I. Cohen

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Original language	English (US)
Pages (from-to)	861-862
Number of pages	2
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	2
Issue number	2
DOIs	https://doi.org/10.1116/1.572527
State	Published - Apr 1984

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@article{aa033634c921464ebccaec5a51e66471,

title = "Summary Abstract: Diffraction from stepped surfaces",

author = "Lent, \{C. S.\} and Cohen, \{P. I.\}",

year = "1984",

month = apr,

doi = "10.1116/1.572527",

language = "English (US)",

volume = "2",

pages = "861--862",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Summary Abstract

T2 - Diffraction from stepped surfaces

AU - Lent, C. S.

AU - Cohen, P. I.

PY - 1984/4

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UR - https://www.scopus.com/pages/publications/84927263522#tab=citedBy

U2 - 10.1116/1.572527

DO - 10.1116/1.572527

M3 - Article

AN - SCOPUS:84927263522

SN - 0734-2101

VL - 2

SP - 861

EP - 862

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 2

ER -

Summary Abstract: Diffraction from stepped surfaces

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