@article{b85d61659dbb4ba798f5face53e0621d,
title = "Summary Abstract: Characterization of AIN films produced by chemical vapor deposition using a novel metal azide precursor",
author = "Schulze, \{R. K.\} and Mantell, \{D. R.\} and Gladfelter, \{W. L.\} and Evans, \{J. F.\}",
note = "Copyright: Copyright 2016 Elsevier B.V., All rights reserved.",
year = "1988",
month = may,
doi = "10.1116/1.575208",
language = "English (US)",
volume = "6",
pages = "2162--2163",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "3",
}